The invention belongs to the technical field of
inert gas purification and
recovery, and relates to a device for removing carbon,
oxygen and
hydrogen impurities from
argon tail gas and a treatment method thereof, the device comprises a first reactor, a second reactor and a third reactor which are communicated in sequence; an inlet of the first reactor is connected with an
argon tail gas conveying
pipe and a
hydrogen conveying
pipe; a first regulating valve is arranged on the
hydrogen conveying
pipe; the first analyzer is connected to an outlet of the first reactor; the second analyzer is connected to an outlet of the second reactor; the temperature measuring unit is connected to an inlet of the second reactor; the
control unit controls the opening degree of the first adjusting valve and the second adjusting valve. The device and the method have the advantages that the device and the method are used for removing carbon,
oxygen and hydrogen impurities in
argon tail gas, and can solve the problems of
high potential safety
hazard, high management difficulty, low
recovery rate, investment increase and
energy consumption increase caused by an excessive hydrogenation and
oxygen removal process in the conventional argon
recovery device and method; the process is effectively simplified, the equipment investment is reduced, the
energy consumption is reduced, and the potential safety
hazard is eliminated.