Purification method of electronic-grade octafluorocyclopentene

A technology of octafluorocyclopentene and a purification method, which is applied in the field of purification of electronic grade octafluorocyclopentene, can solve the problem that the adsorbent cannot achieve the purification effect, and achieve the effect of improving the purity

Active Publication Date: 2019-11-22
ZHEJIANG BRITECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The purity requirement of electronic-grade octafluorocyclopentene should be increased to over 99.999%. At present, related technologies are...

Method used

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  • Purification method of electronic-grade octafluorocyclopentene

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Effect test

Embodiment 1

[0027] A kind of purification method of electronic grade octafluorocyclopentene, its specific scheme is as follows:

[0028] Step 1, rectification and purification, the rectification and purification are divided into primary rectification and secondary rectification; the primary rectification is carried out in the first rectification tower, and the primary rectification is carried out at 47°C and 0.2MPa Distillation; The secondary rectification is carried out in the second rectification tower, and the secondary rectification is carried out at 42°C and 0.1MPa;

[0029] Step 2, low-temperature adsorption purification, the low-temperature adsorption purification is carried out at 0°C, characterized in that an ordered mesoporous low-temperature adsorbent is used;

[0030] Step 3, pressurized adsorption purification, pressurize the octafluorocyclopentene after low-temperature adsorption to 0.8 MPa, and then pass it into the gas purifier for pressurized adsorption. The adsorbent use...

Embodiment 2

[0041] A kind of purification method of electronic grade octafluorocyclopentene, its specific scheme is as follows:

[0042] Step 1, rectification purification, the rectification purification is divided into primary rectification and secondary rectification; the primary rectification is carried out in the first rectification tower, and the primary rectification is carried out at 57°C and 0.5MPa Distillation; The secondary rectification is carried out in the second rectification tower, and the secondary rectification is carried out at 52 ° C and 0.3 MPa;

[0043] Step 2, low-temperature adsorption purification, the low-temperature adsorption purification is carried out at 5°C, characterized in that an ordered mesoporous low-temperature adsorbent is used;

[0044] Step 3, pressurized adsorption purification, pressurize the octafluorocyclopentene after low-temperature adsorption to 1.6 MPa, and then pass it into the gas purifier for pressurized adsorption. The adsorbent used for ...

Embodiment 3

[0055] A kind of purification method of electronic grade octafluorocyclopentene, its specific scheme is as follows:

[0056] Step 1, rectification purification, the rectification purification is divided into primary rectification and secondary rectification; the primary rectification is carried out in the first rectification tower, and the primary rectification is carried out at 77°C and 0.8MPa Distillation; The secondary rectification is carried out in the second rectification tower, and the secondary rectification is carried out at 62 ° C and 0.4 MPa;

[0057] Step 2, low-temperature adsorption purification, the low-temperature adsorption purification is carried out at 10°C, which is characterized in that an ordered mesoporous low-temperature adsorbent is used;

[0058] Step 3, pressurized adsorption purification, pressurize the octafluorocyclopentene after low-temperature adsorption to 2.4 MPa, and then pass it into the gas purifier for pressurized adsorption. The adsorbent...

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Abstract

The invention relates to the field of fine chemical engineering, in particular to a purification method of electronic-grade octafluorocyclopentene. The method comprises the steps of rectification purification, low-temperature adsorption purification, pressurized adsorption purification and the like. According to the method, the final product octafluorocyclopentene is obtained from raw material cyclopentene which is easy to obtain by using a gas phase process. A low-temperature rectification technology is adopted, and combined with a low-temperature adsorption technology and a pressurized adsorption technology to purify the octafluorocyclopentene; modified coconut shell charcoal is used as a mesoporous low-temperature adsorbent; further separation purification is performed through membraneseparation, so that the volume concentration of a water impurity in the octafluorocyclopentene product is less than or equal to 5 ppm; the volume concentration of an oxygen impurity is less than or equal to 3.5 ppm, and the volume concentration of nitrogen which is difficult to separate in the traditional process is less than or equal to 1 ppm. The purity of the product is effectively improved, the purity of the octafluorocyclopentene product is 99.999% or above, and the requirements of semiconductor and microelectronic industries on electronic special gas are met.

Description

technical field [0001] The invention relates to the field of fine chemicals, in particular to a method for purifying electronic-grade octafluorocyclopentene. Background technique [0002] Vapor phase etching of semiconductor materials and / or substrates is accomplished using etching gases such as xenon difluoride. Specifically, in etching gas etching, an etching gas reacts with a solid material such as silicon and molybdenum so that the material is converted into a gas phase and removed. [0003] Polymer self-assembly technology is a key technology for large-scale production of new-generation membranes with high permeability and controllable pore size, for example, the self-assembly of block copolymers (BCPs) into nanostructures with controllable size, Used to create isoporous ultrafiltration (UF) membranes using self-assembled non-solvent-induced phase separation (SNIPS). [0004] CN102503765A relates to a carbon tetrafluoride extraction method and an extraction device. T...

Claims

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Application Information

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IPC IPC(8): C07C17/38C07C17/383C07C17/389C07C23/08B01D53/02B01D53/22B01D53/26B01D67/00B01D71/76B01J20/20B01J20/30
CPCB01D53/02B01D53/228B01D53/261B01D67/00B01D71/76B01J20/20C07C17/38C07C17/383C07C17/389C07C2601/10C07C23/08
Inventor 陈刚张晓东张广第周井森张学良李军张雪刚夏添张云峰
Owner ZHEJIANG BRITECH CO LTD
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