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A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma

A dielectric barrier discharge and plasma technology, applied in the direction of plasma, electrical components, etc., can solve problems such as loss, unwanted precursor fragments, and layer quality degradation, and achieve the effect of increasing production

Active Publication Date: 2009-12-23
NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

An excessively high degree of precursor decomposition leads to the production of undesired precursor fragments which, by gas phase polymerization, eventually lead to a decrease in the quality of the layer or to the generation of undesired dust
As part of the compensation for changes in precursor gas composition along the flow path in the plasma region, higher gas flow rates are typically employed, which results in substantial losses of unreacted precursor gas leaving the plasma region

Method used

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  • A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
  • A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
  • A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma

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Embodiment Construction

[0046] figure 1 A schematic cross-sectional view of a first embodiment of a surface dielectric barrier discharge plasma cell 1 according to the invention is shown. The unit 1 comprises an assembly with a plurality of elongated solid dielectric structural elements 2a, 2b, 2c, 2d. The elements 2a, 2b, 2c, 2d may be arranged substantially parallel to form a solid dielectric structure, such that the outer treatment surface 3a, 3b, 3c, 3d of each solid dielectric structure element 2a, 2b, 2c, 2d is approximately at one Extends in a common treatment plane T. Alternatively, the elements 2a, 2b, 2c, 2d may be arranged such that the respective outside surfaces of said elements are not exactly parallel to each other. This implementation will refer to Figure 11 Further details. Furthermore, gaps 4a, 4b, 4c between adjacent solid dielectric structural elements 2a, 2b, 2c, 2d define gas flow paths P1, 4c extending along one surface of the solid dielectric structural elements 2a, 2b, 2c,...

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Abstract

The invention relates to a surface dielectric barrier discharge plasma unit. The unit comprises a solid dielectric structure provided with an interior space wherein an interior electrode is arranged. Further, the unit comprises a further electrode for generating in concert with the interior electrode a surface dielectric barrier discharge plasma. The unit is also provided with a gas flow path along a surface of the structure.

Description

technical field [0001] The invention relates to a surface dielectric barrier discharge plasma unit comprising a solid dielectric structure having an inner space in which an internal electrode is arranged, the unit further comprising means for generating a surface dielectric barrier discharge in cooperation with the inner electrode Another electrode for plasma, wherein the plasma cell further has a gas flow path along the surface of the structure. Background technique [0002] Solid dielectric structures with electrode structures arranged on or embedded in the dielectric structure are known for carrying out plasma processes. A first electrode is positioned on the treated surface of the structure and a second electrode is positioned on the opposite side of the dielectric structure. In such a process, the gas flow required for the plasma process can be induced to flow along the treatment surface of the structure. [0003] Specialized plasma cells with one internal electrode a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24
CPCH05H1/24H05H2001/245H05H1/2406H05H1/245H05H1/2439H05H1/2441
Inventor 伊夫·洛德韦克·马里亚·克雷格托恩马塞尔·希莫尔蒂莫·胡伊斯尔
Owner NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO