Ventilation system for clean rooms

Abstract

The invention provides a ventilation system for clean rooms, which comprises wind inlet units, wind outlet units and a control unit, wherein a wind replenishing opening is arranged below a clean roomwith a lower clean level; the wind replenishing opening is connected with the wind inlet unit of the clean room with a lower clean level and is connected with the wind outlet unit of an adjacent cleanroom with a higher clean level; and filter screens are arranged in the middle of the ventilation system, and the apertures of the filter screens based on different clean levels are different. The wind inlet unit of the clean room with a lower clean level regulates the wind inlet quantity according to the wind replenishing quantity without influencing the wind outlet quantity of the wind outlet unit, and by analogy, the wind exhaustion of a clean room with a highest clean level is used as a primary wind replenishing source, the wind exhaustion is thoroughly finished until a wind outlet unit with a lowest clean level is replenished. The invention has the effects that the wind replenishing opening is arranged below the clean room, thus large-area turbulent flow of the upward air can not occur, the wind outlet quantity is reduced simultaneously, and a larger amount of electric quantity is saved.

Description

technical field [0001] The invention relates to a ventilation system, in particular to a clean room ventilation system. Background technique [0002] Clean room (Clean Room), also known as clean room or clean room. It is the basis of pollution control. Mass production of contamination-sensitive parts is impossible without a clean room. In FED-STD-2, a clean room is defined as a room with air filtration, distribution, optimization, construction materials and devices, in which specific regular operating procedures are used to control the concentration of airborne particulates to achieve an appropriate particulate cleanliness level . [0003] Clean room refers to the removal of particulates, harmful air, bacteria and other pollutants in the air within a certain space, and the control of indoor temperature, cleanliness, indoor pressure, air velocity and air distribution, noise vibration, lighting, and static electricity. A room with a special design within a certain range of...

AI Technical Summary

Problems solved by technology

[0005] Due to the high cleanliness, the clean room generally adopts a relatively positive pressure form. The air intake and return air of the entire clean area require a large fan delivery capacity to maintain cleanliness, and the power consumption is quite large.

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