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Film automatic stripper

An automatic peeling, dielectric film technology, applied in sustainable manufacturing/processing, electrical components, climate sustainability, etc., can solve problems such as low work efficiency, high labor intensity, damage to useful graphics, etc., to achieve convenient operation, reduce labor the effect of strength

Active Publication Date: 2012-08-01
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem with the manual shaking method is that the work efficiency is low and the labor intensity is high. Especially when the metal film is peeled off, there are often residues that cannot be peeled off. They can only be gently wiped off with soft materials such as cotton balls and brushes. If you are not careful, the useful graphics will be damaged.

Method used

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  • Film automatic stripper
  • Film automatic stripper

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Embodiment Construction

[0016] The following is based on Figure 1-Figure 6 Examples of the present invention are illustrated. and describe in detail.

[0017] Such as figure 1 ---- Figure 6 As shown, the embodiment of the present invention includes; the DC motor 1 is fixed vertically upward through the frame 2 on the center line of the vertical plane at one end of a rectangular cube support 21 with screws. The motor 1 adjusts the rotational speed through the power supply 22 . Metal dial 3 is housed on the rotating shaft of motor upper end, and the edge of dial plane is fixed with driving rod 5, and driving rod is vertical upwards, and metal dial 3 and metal driving rod 5 are all made of metal material. Described rectangular cube support 21 is spliced ​​with 6 pieces of metal plates such as aluminum plates, and its upper plane has a ball linear guide 20 along the horizontal position of the center line, and a driving plate 4, a vertical plate 6, Piston 8, cylinder body 9, pump 11. A liquid stor...

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Abstract

The invention discloses a film automatic stripper which comprises a DC motor, a drive plate, a driving board, a piston, a cylinder body, a pump, a liquid storage plate and a sample table. The invention is characterized in that the motor provides power, and the rotating movement of the motor is converted to the reciprocating linear movement of the piston in the cylinder body by a machinery mechanism; one end of the cylinder body is communicated with the pump; being driven by the piston, the pump sucks a reagent from the liquid storage plate and sprays the reagent to the sample table. The tablesurface is provided with a sample to be processed, and the aim of stripping the surface film is achieved under the function of the repeated spraying of the reagent.

Description

technical field [0001] The invention relates to a semiconductor optoelectronic device manufacturing process technology, in particular to an automatic thin film stripping device, which is suitable for the stripping process of semiconductor dielectric films and metal thin films. Background technique [0002] Generally, there are two methods of stripping the surface film; one is the ultrasonic stripping method, that is, the sample is placed in the reagent, and the stripping of the film is completed by ultrasonic vibration. The second is the manual shaking method, that is, the sample is placed in the reagent in the "flower basket" and shaken by hand until the film is peeled off. The disadvantage of ultrasonic stripping is that it is easy to shatter fragile samples such as mercury cadmium telluride. The problem with the manual shaking method is that the work efficiency is low and the labor intensity is high. Especially when the metal film is peeled off, there are often residues ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/78H01L31/18
CPCY02P70/50
Inventor 王正官王晨飞
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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