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Phase-type zone plate photon sieve

A photonic sieve and zone plate technology, applied in the field of phase-type zone plate photonic sieves

Active Publication Date: 2010-03-03
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

It can focus and image X-rays, which cannot be achieved by general prisms and imaging optics made of glass materials.

Method used

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  • Phase-type zone plate photon sieve
  • Phase-type zone plate photon sieve
  • Phase-type zone plate photon sieve

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Embodiment Construction

[0030] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0031] Phase zone plate photon sieve is a new type of diffractive optical element. The device is placed before or after the diffraction-limited lens, and corrects the light intensity of each spectrum of the far-field diffraction spot of the laser beam to achieve a diffraction center diffraction spot with more concentrated energy than the diffraction center spot of an ordinary photon sieve.

[0032] The phase-type zone plate photonic sieve provided by the present invention adopts smaller diffraction circular holes and a diffraction ring structure to replace the single-circle diffraction aperture of ordinary photon sieves. The invention provides the design structure of the ring diffraction unit, and carries out related simu...

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Abstract

The invention discloses a phase-type zone plate photon sieve. The photon sieve consists of a phase Fresnel zone plate circular ring arranged in the center and a photon sieve circular hole arranged around the circular ring, wherein both the circular ring and the photon sieve circular hole are made on transparent medium; a phase Fresnel zone plate is made on the transparent medium firstly and then aphoton sieve is made around the phase Fresnel zone plate; and the circular hole of the photon sieve encircles the circular ring of the phase Fresnel zone plate. The phase-type zone plate photon sieveis characterized in that the diameter of a pore on the outmost ring of the photon sieve is coincident with the zone width of the outmost ring of the phase Fresnel zone plate, and both the diameter and the zone width are limited by the minimum linewidth of micromachining; and the zone plate on which the photon sieve is based during making and the phase Fresnel zone plate encircled inside the zoneplate have identical parameters, and the diameter of each circular hole is 1.5 times that of the width of a corresponding zone. The phase-type zone plate photon sieve increases the focusing diffraction light intensity of the photon sieve, namely, increasing the energy of the main spot of laser beam far-field diffraction spots.

Description

technical field [0001] The invention belongs to the technical field of wavefront shaping of laser beams, in particular to a phase-type zone plate photon sieve for realizing energy enhancement of a main spot of a laser beam in a far-field diffraction spot. This kind of photon sieve can be used in beam shaping, microelectronics maskless etching, intense laser energy concentration, X-ray focusing and other various instruments that require energy to be focused to the central spot. Background technique [0002] It is a practical subject to increase the energy of the main spot of the laser diffraction spot and suppress the energy of the side spots through various ways. Extremely small main spot width and extremely high main spot energy are required in beam shaping, microelectronic maskless etching, intense laser energy concentration, x-ray focusing and other instruments that require energy to be focused to the central spot. [0003] Phase modulation technology is a technology tha...

Claims

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Application Information

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IPC IPC(8): G03F7/20G21K1/00
Inventor 贾佳谢长青刘明
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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