Process for forming a ferroelectric film through sputtering technology
A ferroelectric and substrate technology, which is applied in the field of liquid discharge devices to form ferroelectric films, can solve the problems of ferroelectric deterioration, impractical technology, Pb, etc., and achieve the improvement of ferroelectricity and the suppression of ferroelectricity The effect of reducing and good ferroelectricity
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[0168] Prepare a commercially available sputtering device. Five sheets of rings 250 a , 250 a , . . . made of stainless steel (SUS) were set to ground potential and placed along the side of the target T with a diameter of 120 mm in the sputtering apparatus. Each of the rings 250a, 250a, . . . has an inner diameter of 130 mm, an outer diameter of 180 mm, and a thickness of 1 mm. In this way, obtained as Figure 1A The film formation device described in . The rings 250a, 250a, . . . are stacked on top of each other such that columnar conductive spacers 250b, 250b, . Each of the spacers 250b, 250b, ... is substantially smaller in size than each of the rings 250a, 250a, .... Accordingly, the gas G introduced into the vacuum chamber 210 can pass through the space 204 between the adjacent ones 250a, 250a without being adversely affected by the spacers 250b, 250b, . . . , and thus can reach the target T easily.
[0169] The separation distance between the substrate B and the targ...
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