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Dead halt alarm method for CMP equipment and apparatus therefor

An alarm device and equipment technology, applied in grinding devices, metal processing equipment, grinding/polishing equipment, etc., can solve the problems of waste pieces, affecting the normal operation of the equipment and production safety, to ensure the safety of the operation and improve the automatic alarm function , the effect of improving production efficiency

Active Publication Date: 2010-03-31
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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AI Technical Summary

Problems solved by technology

When the CMP equipment crashes, it usually takes at least half an hour or more to be discovered, which seriously affects the normal operation of the equipment and production safety.
After the crash, the products in the CMP equipment need to undergo defect inspection, and there is a risk of waste

Method used

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  • Dead halt alarm method for CMP equipment and apparatus therefor
  • Dead halt alarm method for CMP equipment and apparatus therefor
  • Dead halt alarm method for CMP equipment and apparatus therefor

Examples

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Embodiment Construction

[0019] see figure 2 , the crash alarm method of the CMP equipment of the present invention is to monitor the terminal valves of all grinding liquid pipelines of all grinding tables of the CMP equipment, start timing when all terminal valves are closed, and continue until all terminal valves are closed. At the preset time, an alarm signal will be issued. When all the terminal valves are closed for less than the preset time, it means that one or more terminal valves are open within the preset time, then restart the timing monitoring from the next time when all the terminal valves are closed .

[0020] When the CMP equipment is in a normal state, each grinding table has at least one grinding liquid pipeline to discharge grinding liquid or pure water regularly. If all the grinding liquid pipelines stop discharging the grinding liquid and pure water within a preset time, it can be determined that the CMP equipment is abnormal, so an alarm signal is sent. The staff can manually ...

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PUM

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Abstract

The present invention discloses a dead halt alarm method for CMP equipment. The CMP equipment comprises at least one grinding table, the grinding table has at least one grinding fluid pipeline, each grinding fluid pipeline has a terminal valve, the terminal valve opens only when the grinding fluid pipeline discharges grinding fluid or pure water. According to the method, the terminal valves of allthe grinding fluid pipelines of all grinding tables of the CMP equipment are monitored, time is counted when all terminal valves are closed, an alarm signal is sent when all the terminal valves are closed till a preset time. The invention also discloses a dead halt alarm apparatus for CMP equipment for implanting the method. The invention completes the automatic alarm function of CMP equipment, reduces the use danger and fault rate of CMP equipment, ensures the operation security of products, and improves the production efficiency.

Description

technical field [0001] The invention relates to a production process monitoring method in the field of semiconductors and a device thereof. Background technique [0002] CMP (Chemical Mechanical Polisher, chemical mechanical polishing) equipment is a common equipment in the semiconductor industry. A complete set of dry-in-dry-out CMP equipment includes three parts: a grinder (Polisher), a cleaning and drying device (Cleaner) and an industrial transport buffer system (FABS, Factory Automatic Buffering System). [0003] Among them, for the schematic structure of the grinder, please refer to figure 1 . Usually, the grinding machine is equipped with one to four grinding tables 1 , and each grinding table 1 has a grinding pad 2 , and the grinding head 3 carries a silicon wafer 5 to grind on the grinding pad 2 . Each grinding table 1 also has at least one grinding liquid pipeline 4, and the end of each grinding liquid pipeline 4 has a terminal valve 41, and the valve 41 is only...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/04B24B57/02H01L21/304
Inventor 祝志敏
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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