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Dead halt alarm device for CMP equipment

An alarm device and equipment technology, applied in the direction of grinding devices, metal processing equipment, grinding/polishing equipment, etc., can solve problems such as waste chips, affecting normal operation of equipment and production safety, so as to ensure operation safety and perfect automatic alarm function , the effect of improving production efficiency

Active Publication Date: 2011-08-24
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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AI Technical Summary

Problems solved by technology

When the CMP equipment crashes, it usually takes at least half an hour or more to be discovered, which seriously affects the normal operation of the equipment and production safety.
After the crash, the products in the CMP equipment need to undergo defect inspection, and there is a risk of waste

Method used

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  • Dead halt alarm device for CMP equipment
  • Dead halt alarm device for CMP equipment
  • Dead halt alarm device for CMP equipment

Examples

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Embodiment Construction

[0018] see figure 2 , the crash alarm method of the CMP equipment of the present invention is to monitor the terminal valves of all grinding liquid pipelines of all grinding tables of the CMP equipment, start timing when all terminal valves are closed, and continue until all terminal valves are closed. At the preset time, an alarm signal will be issued. When all the terminal valves are closed for less than the preset time, it means that one or more terminal valves are open within the preset time, then restart the timing monitoring from the next time when all the terminal valves are closed .

[0019] When the CMP equipment is in a normal state, each grinding table has at least one grinding liquid pipeline to discharge grinding liquid or pure water regularly. If all the grinding liquid pipelines stop discharging the grinding liquid and pure water within a preset time, it can be determined that the CMP equipment is abnormal, so an alarm signal is sent. The staff can manually ...

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PUM

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Abstract

The present invention discloses a dead halt alarm device for a Chemical Mechanical Polisher (CMP) equipment. A driving signal when a terminal valve is closed is a low level, and the driving signal when the terminal valve is open is a high level, which includes: a logic or circuit for which the driving signals of all lapping liquid pipes of all lapping platforms of the CMP equipment are all used as the input; a timing circuit of which the input is used as the output of the logic or circuit, and the timing circuit being ouput as low level only when the input in a presetting apex of tongue is always low level, or else no output or outputting high level; a logic not circuit for which the output of the timing circuit is used as an input; an alarm circuit for which the output of the logic not circuit is used as an input, and the alarm circuit sending alarm signals only when the input is high level. The invention completes the automatic alarm function of CMP equipment, reduces the use danger and fault rate of CMP equipment, ensures the operation security of products, and improves the production efficiency.

Description

technical field [0001] The invention relates to a production process monitoring method in the field of semiconductors and a device thereof. Background technique [0002] CMP (Chemical Mechanical Polisher, chemical mechanical polishing) equipment is a common equipment in the semiconductor industry. A complete set of dry-in-dry-out CMP equipment includes three parts: a grinder (Polisher), a cleaning and drying device (Cleaner) and an industrial transport buffer system (FABS, Factory Automatic Buffering System). [0003] Among them, for the schematic structure of the grinder, please refer to figure 1 . Usually, the grinding machine is equipped with one to four grinding tables 1 , and each grinding table 1 has a grinding pad 2 , and the grinding head 3 carries a silicon wafer 5 to grind on the grinding pad 2 . Each grinding table 1 also has at least one grinding liquid pipeline 4, and the end of each grinding liquid pipeline 4 has a terminal valve 41, and the valve 41 is only...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/04B24B57/02H01L21/304
Inventor 祝志敏
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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