Method and system for determining abnormal factors
A technology for determining methods and factors, applied in the field of determination of abnormal factors, to achieve the effect of improving production efficiency and manufacturing process
Inactive Publication Date: 2012-02-15
SHARP KK
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Problems solved by technology
However, when there are multiple manufacturing processes like the semiconductor manufacturing process, the number of manufacturing variables that may become abnormal factors is very large, and it is difficult for quality managers to check each manufacturing variable
Method used
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Embodiment Construction
[0156]Hereinafter, the present invention will be described in detail based on the illustrated embodiments.
[0157] figure 2 A block configuration of an abnormal factor specifying system (indicated as a whole by reference numeral 10 ) according to one embodiment of the present invention for specifying a defective product generation factor in the semiconductor production process 60 is shown.
[0158] The semiconductor production process 60 performs one or more manufacturing processes 15 on a product (wafer in this example), and performs an inspection process 14 including good or bad judgment of the product that has undergone the manufacturing process 15 .
[0159] This abnormal factor specifying system 10 has a database 50 as a storage unit, an abnormal factor specifying unit 40 , and a display device 11 that displays processing results by the abnormal factor specifying unit 40 .
[0160] The database 50 acquires, for each product, one or more types of manufacturing data 13 i...
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In an abnormal factor specifying method, principal component analysis is performed to extract at least one feature quantity best expressing a manufacturing condition of articles of manufacture determined to be non-defective from manufacturing data on the articles of manufacture (S2, S4). In a feature quantity space expressed with the extracted each feature quantity as an axis, a distance between an origin and a point representing the manufacturing data on each article of manufacture as a main significant difference between average manufacturing data at the time of non-defective article manufacturing and each manufacturing data at the time of defective article manufacturing, is calculated (S5). A contribution ratio of each manufacturing data in the main significant difference is calculated as each main influence (S6). Manufacturing data with the main influences at the time of defective article manufacturing being substantially increased from that at the time of non-defective article manufacturing is specified as an abnormal factor from the manufacturing data (S7, S8).
Description
technical field [0001] The present invention relates to a method and system for determining an abnormal factor, and more specifically, relates to a method and a system for identifying an abnormal factor by using multivariate analysis to represent a defect from the production process when a defective product is generated in a production process having a plurality of manufacturing processes such as a semiconductor product production process. A method and system for analyzing the acquired manufacturing data of manufacturing conditions to determine the manufacturing data that is the main factor causing defective products. [0002] In addition, the present invention also relates to a program for causing a computer to execute the method for identifying abnormal factors. [0003] In addition, the present invention also relates to a computer-readable recording medium recording the program. Background technique [0004] For efficient production in the manufacturing process of mass-...
Claims
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IPC IPC(8): G05B19/418G06Q50/00G06Q50/04
CPCG05B19/41875G05B2219/32221G06Q10/06Y02P90/02
Inventor 一色昭寿
Owner SHARP KK