Power driving distribution method of moving iron type planar motor coil array

Abstract

The invention relates to a power driving distribution method of a moving iron type planar motor coil array. The method comprises the following steps: dividing a square stator coil array of the moving iron type planar motor into n*n dividing areas, dividing each dividing area into a work state area and a transitional state area, and determining the total quantity of power drivers according to the quantity of coils in each dividing area, and forming a driver array; and connecting the driver array with the stator coil array by switch equipment, and guaranteeing that each driver is connected with the coil at a corresponding position in each dividing area by the switch equipment. According to the position of a rotor magnetic steel array, the power driving distribution method determines the range of action of the coil array, uses the limitation of the transitional state area to control the on-off and the current of the coils, and realizes large-stroke planar vector movement of a rotor. The power driving distribution method can solve the problems of complex structure and extremely high total cost of the driver equipment, resulting from excessive quantity of the drivers due to excessive quantity of the stator coils.

Description

technical field [0001] The invention relates to a connection method between a moving iron planar motor coil array and a driver, in particular to a driver distribution method. Background technique [0002] With the development of advanced manufacturing technology, some precision control equipment such as lithography machines need to perform precise motion control in an approximately flat space, and such high-precision motion is realized by ultra-precision planar motors. The planar motor has the characteristics of two-dimensional direct drive, which can realize the following movements: large-stroke movement in the horizontal degree of freedom X and Y directions, which is used to realize fast stepping and precise scanning of the wafer; small movement in the vertical degree of freedom Z direction ; Tiny rotations around the three coordinate axes X, Y, and Z are used to achieve leveling and focusing. Therefore, it has broad application prospects in two-dimensional plane position...

AI Technical Summary

Problems solved by technology

For moving-coil planar motors, since it is necessary to provide power to the moving coils and equip a cooling system, it is necessary to connect cables to the mover, which brings great inconvenience to the structural design and the work of the motor. Increase the movement interference of the cable on the mover

The moving iron planar motor does not have such a problem, and when the required stroke is large, it only needs to add an extra coil. However, the disadvantage of this structure is that as the number of coils increases, the required drivers increase. it's an expensive outlay

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