Trichlorosilane synthesis gas gas-solid separating device
A technology of syngas gas and trichlorosilane, applied in halogenated silicon compounds, halogenated silanes, etc., can solve the problems of safety accidents of filter elements, high cost of use, poor wear resistance, etc., and achieve good wear resistance and long service life. , the effect of reducing replacement costs
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[0019] The present invention will be further described below in conjunction with the accompanying drawings.
[0020] like figure 1 and figure 2 As shown, the gas-solid separation device for trichlorosilane synthesis gas of the present invention includes a separation vessel and a filter element 8 arranged in the cavity of the separation vessel, and a synthesis gas inlet 1 communicating with the cavity is provided on the shell of the separation vessel And the synthesis gas outlet 6, the filter element 8 adopts a metal sintered filter element. Because the metal sintered filter element has good wear resistance characteristics, it has a long service life when filtering silicon powder particles, thereby reducing the replacement cost of the filter element; at the same time, the metal sintered filter element has good adsorption performance and can be compared Good removal of silicon powder particles below 10um.
[0021] In the above embodiment, the filter element 8 may be a large ...
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