Magnetic suspension inching platform with six degrees of freedom

[0009] Specific embodiment 1: The six-degree-of-freedom magnetic levitation micro-motion platform described in this embodiment includes a platform base, a support platform 4, m magnetic levitation horizontal support mechanisms 1 and m magnetic levitation vertical support mechanisms 2, m magnetic levitation horizontal support mechanisms 1 and m magnetic levitation vertical support mechanisms 2 are fixed on the periphery of the top surface of the platform base and form a symmetrical structure of 2m polygons. The support platform 4 and each magnetic levitation horizontal support mechanism 1 mover 11 and m magnetic levitation vertical supports The mover 21 of the mechanism 2 is fixedly connected, the magnetic levitation vertical support mechanism 2 has the same structure as the magnetic levitation horizontal support mechanism 1, the movement direction of the mover 21 of the magnetic levitation vertical support mechanism 2 is the vertical direction, and the magnetic levitation horizontal support mechanism The moving direction of the mover 11 of 1 is the horizontal direction.

[0010] When the value of m in this embodiment is 3, see figure 1 As shown, three maglev horizontal support mechanisms 1 and three maglev vertical support mechanisms 2 form a hexagon with a symmetrical structure. At this time, refer to the structure of the six-degree-of-freedom magnetic levitation micro-motion platform in this embodiment figure 2 As shown, the support platform 4 is also a hexagon with a symmetrical structure, and each side of the support platform 4 is fixedly connected to each of the magnetic levitation horizontal support mechanism 1 and the movers of the three magnetic levitation vertical support mechanisms 2 through a fixing member 5.

[0011] When the value of m in this embodiment is 4, the four maglev horizontal support mechanisms 1 and the four maglev vertical support mechanisms 2 form an octagon with a symmetrical structure, and so on.

[0012] Specific implementation manner 2: see Figure 7 This embodiment will be described. The difference between this embodiment and the six-degree-of-freedom magnetic levitation micro-motion platform described in the first embodiment is that the maglev horizontal support mechanism 1 is composed of a stator and a mover 11. The stator includes a left yoke plate 101 and a left yoke plate permanent magnet assembly 103. Left control coil group 102, two supporting edges 12, right yoke plate 111, right yoke plate permanent magnet group 113, right control coil group 112, left yoke plate 101 and right yoke plate 111 are arranged parallel to each other, left yoke plate 101 The right yoke plate 111 and the two supporting edges 12 form a rectangular frame. The left yoke plate permanent magnet group 103 is fixed on the right surface of the left yoke plate 101, and the right yoke plate permanent magnet group 113 is fixed on the left surface of the right yoke plate 111. The left yoke plate permanent magnet group 103 and the right yoke plate permanent magnet group 113 respectively include two permanent magnets, and the outer side of each permanent magnet is wound with a horizontal coil, which is wound around two of the left yoke plate permanent magnet group 103 The two coils outside the permanent magnet form the left control coil group 102, and the two coils wound around the two permanent magnets in the right yoke plate permanent magnet group 113 form the right control coil group 112. The mover 11 consists of two permanent magnets and It consists of a connecting plate, the connecting plate is located between two permanent magnets, the mover 11 is located between the left yoke plate permanent magnet group 103 and the right yoke plate permanent magnet group 113, and the left yoke plate permanent magnet group 103, The right yoke plate permanent magnet group 113 and the two permanent magnets in the mover are located in the same plane.

[0013] Specific implementation manner three: see Figure 8 This embodiment will be described. The difference between this embodiment and the six-degree-of-freedom magnetic levitation micro-motion platform described in the first embodiment is that the maglev horizontal support mechanism 1 is composed of a stator and a mover 11. The stator includes a left yoke plate 101 and a left yoke plate permanent magnet assembly 103. Left control coil group 102, two supporting edges 12, right yoke plate 111, right yoke plate permanent magnet group 113, right control coil group 112, left yoke plate 101 and right yoke plate 111 are arranged parallel to each other, left yoke plate 101 The right yoke plate 111 and the two supporting edges 12 form a rectangular frame. The left yoke plate permanent magnet group 103 is fixed on the right surface of the left yoke plate 101, and the right yoke plate permanent magnet group 113 is fixed on the left surface of the right yoke plate 111. The left yoke plate permanent magnet group 103 and the right yoke plate permanent magnet group 113 respectively include two permanent magnets. The left control coil group 102 is wound on the left yoke plate 101 and is located in the two permanent magnet groups in the left yoke plate permanent magnet group 103. Between the magnets, the right control coil group 112 is wound on the right yoke plate 111 and is located between the two permanent magnets in the right yoke plate permanent magnet group 113. The mover 11 is composed of two permanent magnets and a connecting plate. The connecting plate is located between two permanent magnets, the mover 11 is located between the left yoke plate permanent magnet group 103 and the right yoke plate permanent magnet group 113, and the left yoke plate permanent magnet group 103 and the right yoke plate permanent magnet group 113 and the two permanent magnets in the mover are located in the same plane.