Magnetic suspension inching platform with six degrees of freedom

A micro-movement platform and magnetic levitation technology, which is applied to the holding device and electrical components using magnetic attraction or thrust, can solve the problems of low positioning accuracy, low thrust density, and large loss, and achieve high positioning accuracy, easy control, and structure. simple effect

Active Publication Date: 2010-06-16
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the existing six-degree-of-freedom magnetic levitation micro-motion platform, the high heat generation and large loss of the coil, at the same time, the structure of the voice coil motor is relatively complex, the thrust density is low, the

Method used

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  • Magnetic suspension inching platform with six degrees of freedom
  • Magnetic suspension inching platform with six degrees of freedom
  • Magnetic suspension inching platform with six degrees of freedom

Examples

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Example Embodiment

[0009] Specific embodiment 1: The six-degree-of-freedom magnetic levitation micro-motion platform described in this embodiment includes a platform base, a support platform 4, m magnetic levitation horizontal support mechanisms 1 and m magnetic levitation vertical support mechanisms 2, m magnetic levitation horizontal support mechanisms 1 and m magnetic levitation vertical support mechanisms 2 are fixed on the periphery of the top surface of the platform base and form a symmetrical structure of 2m polygons. The support platform 4 and each magnetic levitation horizontal support mechanism 1 mover 11 and m magnetic levitation vertical supports The mover 21 of the mechanism 2 is fixedly connected, the magnetic levitation vertical support mechanism 2 has the same structure as the magnetic levitation horizontal support mechanism 1, the movement direction of the mover 21 of the magnetic levitation vertical support mechanism 2 is the vertical direction, and the magnetic levitation horizon...

Example Embodiment

[0012] Specific implementation manner 2: see Figure 7 This embodiment will be described. The difference between this embodiment and the six-degree-of-freedom magnetic levitation micro-motion platform described in the first embodiment is that the maglev horizontal support mechanism 1 is composed of a stator and a mover 11. The stator includes a left yoke plate 101 and a left yoke plate permanent magnet assembly 103. Left control coil group 102, two supporting edges 12, right yoke plate 111, right yoke plate permanent magnet group 113, right control coil group 112, left yoke plate 101 and right yoke plate 111 are arranged parallel to each other, left yoke plate 101 The right yoke plate 111 and the two supporting edges 12 form a rectangular frame. The left yoke plate permanent magnet group 103 is fixed on the right surface of the left yoke plate 101, and the right yoke plate permanent magnet group 113 is fixed on the left surface of the right yoke plate 111. The left yoke plate p...

Example Embodiment

[0013] Specific implementation manner three: see Figure 8 This embodiment will be described. The difference between this embodiment and the six-degree-of-freedom magnetic levitation micro-motion platform described in the first embodiment is that the maglev horizontal support mechanism 1 is composed of a stator and a mover 11. The stator includes a left yoke plate 101 and a left yoke plate permanent magnet assembly 103. Left control coil group 102, two supporting edges 12, right yoke plate 111, right yoke plate permanent magnet group 113, right control coil group 112, left yoke plate 101 and right yoke plate 111 are arranged parallel to each other, left yoke plate 101 The right yoke plate 111 and the two supporting edges 12 form a rectangular frame. The left yoke plate permanent magnet group 103 is fixed on the right surface of the left yoke plate 101, and the right yoke plate permanent magnet group 113 is fixed on the left surface of the right yoke plate 111. The left yoke pl...

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Abstract

The invention provides a magnetic suspension inching platform with six degrees of freedom, belonging to the field of electric machines. The invention solves the problems that the conventional magnetic suspension inching platform with six degrees of freedom has large heat productivity of coils and great wastage, and synchronously, a voice coil motor has relatively complex structure and low thrust force density, the platform has low rigidity and big thermal deformation, and a system has poor dynamic characteristic and low location precision. Magnetic suspension horizontal supporting mechanisms with the number of m and the magnetic suspension vertical supporting mechanisms with the number of m in the inching platform are distributed alternately and respectively fixed on the periphery of the top surface of a platform base and form a symmetric-structure shape with 2m sides, a supporting platform 4 is fixedly connected with the rotator of each magnetic suspension horizontal supporting mechanism and the rotator of each magnetic suspension vertical supporting mechanism, the magnetic suspension vertical supporting mechanisms and the magnetic suspension horizontal supporting mechanisms have the same structure, the direction of motion of the magnetic suspension vertical supporting mechanisms is a vertical direction, the direction of the motion of the magnetic suspension horizontal supporting mechanisms is a horizontal direction, and m is a nature number.

Description

technical field [0001] The invention belongs to the field of motors, and in particular relates to a six-degree-of-freedom magnetic suspension micro-motion platform. Background technique [0002] Modern precision and ultra-precision processing equipment has an urgent need for high-response, high-speed, high-precision multi-degree-of-freedom workbenches, such as machining, electronic product production, mechanical loading and unloading, manufacturing automated instrumentation equipment, and even robot drives. Usually these devices are powered by a rotary motor, and then converted into linear motion by mechanical devices such as belts and ball screws. Due to the complexity of the mechanical device, the transmission accuracy and speed are limited, and frequent adjustments are required, resulting in high cost, poor reliability, and large volume. The original multi-degree-of-freedom workbench was realized by two direct-driven linear motors, and a stacked drive structure was adopt...

Claims

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Application Information

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IPC IPC(8): H02N15/00
Inventor 寇宝泉吴红星刘奉海
Owner HARBIN INST OF TECH
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