Short arc type discharge lamp

A discharge lamp, short arc technology, applied in the direction of discharge lamps, high pressure discharge lamps, discharge tubes, etc., can solve the problems of reduced illuminance, bulb breakage, etc.

Inactive Publication Date: 2010-09-08
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, since the hydrogen collector 210 is attached to the bulb 201 as described above, since the hydrogen collector 210 reacts with silicon oxide, which is a constituent component of the bulb 201, there is a risk that the illuminance may decrease or the bulb may break.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0042] figure 2 will be figure 1 An enlarged partial explanatory diagram of part X of the short-arc discharge lamp. This figure shows the first embodiment of the structure of the shaft portion 2A and the hydrogen collector 30 fixed to the shaft portion 2A. Hereinafter, for convenience, the shaft portion 2A on the cathode 2 side will be described. image 3 It is an explanatory diagram showing the detailed structure of the hydrogen collector 30 . image 3 (A) is a perspective view of the hydrogen collector viewed obliquely, image 3 (B) is the hydrogen collector with image 3 A cross-sectional view in the longitudinal direction cut along line A-A shown in (A), image 3 (C) is the hydrogen collector with image 3 Diameter cross-sectional view taken along line B-B shown in (A).

[0043] Such as image 3 As shown, the hydrogen collector 30 is composed of a straight tube-shaped hollow container 31 made of a hydrogen-permeable metal, and a getter material 32 sealed inside t...

Embodiment 2

[0048] Figure 4 will be figure 1 An enlarged partial explanatory diagram of part X of the short-arc discharge lamp. This figure shows a second embodiment of the structure of the shaft portion 2A and the hydrogen collector 50 fixed to the shaft portion 2A. Figure 5 It is an explanatory diagram showing the detailed structure of the hydrogen collector 50 . Figure 5 (A) is a perspective view of the hydrogen collector viewed obliquely, Figure 5 (B) is the hydrogen collector with Figure 5 (A) Cross-sectional view taken along the line A-A in the width direction.

[0049] Such as Figure 5 As shown, the hydrogen collector 50 is composed of a straight tube-shaped hollow container 51 made of a hydrogen-permeable metal, and a getter material 52 sealed in the hollow container 51 . Such as Figure 5 As shown in (A), in the hollow container 51, the slope-shaped sealing portion 51A whose outer diameter gradually decreases toward the end of the hollow container 51 and the image...

Embodiment 3

[0052] Image 6 will be figure 1 An enlarged partial explanatory diagram of part X of the short-arc discharge lamp. This figure shows a third embodiment of the structure of the shaft portion 2A and the hydrogen collector 70 fixed to the shaft portion 2A. Figure 7 It is a perspective view showing the detailed structure of the hydrogen collector 70 .

[0053] Such as Figure 7 As shown, the hydrogen collector 70 has a curved tube-shaped hollow container 71 that bends a tubular member sealed with a getter material by closing both ends thereof so as to have a coil shape as a whole. The hollow container 71 has a coil inner diameter adjusted to act an elastic force on the shaft portion 2A when fixed to the shaft portion 2A.

[0054] Such as Image 6 As shown, in this embodiment, an annular concave portion 21A is formed across the entire circumference of the shaft portion 2A. Such as Image 6 As shown, the hydrogen collector 70 is fixed to the shaft portion 2A by the elastic...

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PUM

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Abstract

The object of the invention is to provide a short arc type discharge lamp, the invention can enable the illumination fluctuation ratio of the short arc type discharge lamp to be stable by adsorbing hydrogen gas in a luminous tube, and a hydrogen collecting device is safely and easily fixed in the luminous tube. The short arc type discharging lamp has a luminous tube; a seal tube which is respectively connected with two ends of the luminous tube and extends toward the outside of a tubular shaft direction; a pair of electrodes which are configured relatively with each other inside of the luminous tube; and a hollow container composed of substances enabling the hydrogen to penetrate and the hydrogen collecting device composed of air suction materials enclosed inside of the hollow container, wherein, the hydrogen collecting device is fixed with the electrodes.

Description

technical field [0001] The present invention relates to a short-arc discharge lamp suitable for use as a light source for exposure or as a light source for backlight of a projector in the fields of manufacturing semiconductors or liquid crystals. Background technique [0002] In the short-arc discharge lamp, the distance between the ends of a pair of electrodes facing each other inside the arc tube is short and close to a point light source. Therefore, it can be used as a light source for exposure equipment or backlight of a projector by combining it with an optical system. [0003] Patent Documents 1 and 2 disclose conventional short-arc discharge lamps. As disclosed in Patent Document 1, excimer luminescence of xenon gas as a luminescent gas in a xenon short-arc lamp, xenon gas, krypton gas, and argon gas as a buffer gas in a mercury vapor short-arc lamp will cause There is a problem of cloudiness occurring on the inner surface of the discharge vessel. In this document, ...

Claims

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Application Information

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IPC IPC(8): H01J61/26
CPCH01J61/86H01J61/26H01J7/186
Inventor 松岛竹夫宗丰安田幸夫
Owner USHIO DENKI KK
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