Control substrate and control substrate manufacturing method
A technology for controlling substrates and manufacturing methods, which is applied in semiconductor/solid-state device manufacturing, instruments, electrical components, etc., and can solve problems such as increased manufacturing costs
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[0087] As an example, a test substrate in which a substrate main body, a base layer, and a conductor layer were sequentially laminated was produced.
[0088] First, prepare a glass substrate of 200 mm x 200 mm as the substrate main body, then apply a negative photosensitive material mainly composed of acrylic resin on the entire surface of one surface of the substrate main body, and heat at 95° C. for 10 minutes. The pre-baking treatment is performed, and then the coated photosensitive material is exposed, developed with KOH, and then post-baked at 170° C. for 30 minutes to form a base layer.
[0089] Then, a suspension of Ag with a particle diameter of 3 nm to 5 nm dispersed in toluene was applied to one surface of the base layer in the thickness direction Z, and heat treatment was performed by heating at 170° C. for 30 minutes to form a conductor layer.
[0090] In the example, the thickness of the substrate body is 0.7 mm, the thickness of the base layer is 1 μm, and the th...
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