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Precise positioning sputtering manipulator and positioning method

A technology of precise positioning and manipulators, applied in manipulators, program-controlled manipulators, sputtering coating, etc., can solve the problems of relying on the operator, unable to guarantee the symmetry of the cover plate, and difficult to ensure the effect of cover plate adjustment, so as to improve production Efficiency, the effect of overcoming deviation and dropping disc phenomenon

Inactive Publication Date: 2012-02-01
HENAN KAIRUI DIGITAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the existing visual inspection technology is simple, it completely depends on the operator's technical level, and it is difficult to guarantee the effect of the cover plate adjustment.
During the debugging process of the sputtering manipulator, the level adjustment of the cover plate can basically be completed by using the height gauge, but the symmetry of the cover plate cannot be guaranteed

Method used

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  • Precise positioning sputtering manipulator and positioning method
  • Precise positioning sputtering manipulator and positioning method
  • Precise positioning sputtering manipulator and positioning method

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Embodiment Construction

[0026] Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements.

[0027] Such as Figure 5As shown, the present invention precisely locates the sputtering manipulator 1, including a motor 11 and a motor sleeve arm 12 connected to the motor 11. The motor 11 drives the rotation of the motor sleeve arm 12, and the motor sleeve arm 12 is equidistant along the periphery of the motor sleeve arm 12. The distribution of spacing has cylinder base 13, and cylinder 14 is all installed on each described cylinder base 13, and the piston rod 15 of described cylinder 14 is vertically arranged, and is detachably installed with vacuum suction nozzle 150 on the described piston rod 15. The cover plate 16 for taking and placing the disc 100, the piston rod 15 moves vertically up and down under the action of the cylinder 14, and also includes a positioning fixture 20 for positioning the cover plate 16 in t...

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Abstract

The invention discloses a precise positioning sputtering manipulator, which comprises a motor and a motor sleeve arm connected with the motor, the motor drives the motor sleeve arm to rotate, and cylinder seats are distributed at equal diameters and distances around the motor sleeve arm, and each cylinder seat is Both are equipped with a cylinder, the piston rod of the cylinder is vertically arranged, and a cover plate with a vacuum nozzle for holding and placing a disc is detachably installed on the piston rod, and a positioning fixture for positioning the installation position of the cover plate is also included. Including the base, there is a mounting hole in the center of the base, the motor shell is accommodated in the mounting hole of the positioning fixture, and the base is provided with a station hole corresponding to the cover plate one by one, and the station hole is equal to the center of the installation hole Distributed at equal intervals, the cover plates are accommodated in the station holes one by one to realize the positioning of the installation position of the cover plates. The sputtering manipulator greatly improves the production efficiency of the optical disc production line while ensuring the quality and low production cost. In addition, the invention also discloses a positioning method.

Description

technical field [0001] The invention relates to a precise positioning sputtering manipulator and a positioning method thereof, in particular to a positioning fixture for improving the asymmetry problem of a sputtering manipulator arm of a sputtering unit in a CD production line and a method for using the positioning fixture. Background technique [0002] The optical storage medium has developed from CD to DVD, and now to BD Blu-ray disc. In order to increase the stored information capacity, the size of the information record must be continuously reduced, which requires that the wavelength of the used reading and recording light waves must be gradually shortened. The numerical aperture (NA) value of the reading objective lens is constantly increasing, so the wavelength used by the optical storage medium (disc) is from 780nm of CD to 650nm of DVD, and the blue laser with a wavelength of 405nm is used when developing to BD Blu-ray disc. The numerical aperture NA value of the ob...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B7/26B25J9/08C23C14/34
Inventor 杨明生朱富强王勇
Owner HENAN KAIRUI DIGITAL
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