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Making method of flexible display assembly

A technology for flexible displays and manufacturing methods, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., capable of solving problems such as poor surface flatness of metal flexible TFT substrates

Inactive Publication Date: 2011-04-13
INNOCOM TECH (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the technical problem of the poor surface flatness of the metal flexible TFT substrate caused by the manufacturing method of the flexible display component in the prior art, the present invention provides a flexible display component capable of producing a metal flexible TFT board with a better surface flatness production method

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  • Making method of flexible display assembly

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Embodiment Construction

[0012] see Figure 2 to Figure 8 , which is a preferred embodiment of the manufacturing method of the flexible display component of the present invention. like figure 2 As shown, the present invention firstly provides a carrier substrate 200 defining a first surface 202 and an opposite second surface 204 . The carrier substrate 200 is a translucent substrate, which may include translucent materials such as glass, quartz or sapphire. Then, a sacrificial layer 210 is formed on the first surface 202 of the carrier substrate 200, and the thickness of the sacrificial layer 210 is less than 500 angstrom. In this preferred embodiment, the sacrificial layer 210 is formed on the first surface 202 through a chemical vapor deposition (CVD) process, and includes amorphous silicon material. It should be noted that in the CVD process, the hydrogen content of the sacrificial layer 210 can be increased by adding and adjusting silane (SiH4) and hydrogen. In addition, after the CVD process...

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Abstract

The invention relates to a making method of a flexible display assembly, which comprises the following steps of: firstly, providing a bearing substrate, and forming a sacrificial layer on the bearing substrate; secondly, forming a metal layer and a buffer layer on the sacrificial layer; thirdly, forming at least one drive assembly on the buffer layer; and finally, carrying out laser treatment on the bearing substrate so as to separate the metal layer from the bearing substrate. The base plate of the flexible display assembly obtained by using the making method of the flexible display assembly has good flatness.

Description

technical field [0001] The invention relates to a manufacturing method of a flexible display component. Background technique [0002] With the vigorous development of display technology and information products, the display has entered the flat panel display (FPD) era from the traditional cathode ray tube (cathode ray tube, CRT). The flexible display has become a new trend in the development of the next generation of displays because it is thinner, more flexible, impact-resistant and safer than the conventional flat-panel displays with rigid glass panels, and is not limited by occasions and spaces. trend. [0003] Flexible thin film transistor (thin film transistor, hereinafter referred to as TFT) substrate is one of the important components of flexible displays, and the selection and development of its substrate material is the most important issue in the development of flexible displays. At present, the choices of flexible substrate materials include plastic substrates, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/84H01L21/336H01L21/02
CPCH01L27/1266H01L27/1214H01L27/1218
Inventor 廖维仑叶冠华赖晓萍吴宏基
Owner INNOCOM TECH (SHENZHEN) CO LTD