Quartz oscillator and measurement method using same
Inactive Publication Date: 2011-04-20
ULVAC INC
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Problems solved by technology
[0008] However, if a plurality of detection parts are provided in one piezoelectric plate, or a plurality of sensors are used, there are problems such as labor-intensive, sensor manufacturing costs increase, and individual differences for each detection part.
[0009] In addition, in the case of drawing a calibration curve with one sensor, it is necessary to prepare a plurality of standard samples, so there is a problem that it takes time until the actual measurement. The density and viscosity are calculated based on the resonant frequency of the information, so there is a problem that the measurement accuracy is quite low.
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[0064] Next, an embodiment of the present invention will be described with reference to the drawings.
[0065] Such as figure 2 As shown, a 27 MHz crystal resonator 3 equipped with gold electrodes 2 and 2 on both sides of the piezoelectric plate 1 is prepared, and on the surface of the gold electrode 2 on the side where the solution of the crystal resonator 3 contacts, as shown in FIG. image 3 As shown, a plurality of grooves 4 , 4 , 4 each having a rectangular cross section are adjacently provided to form a detection portion on the electrode 3 .
[0066] The electrodes 2 and 2 are made of gold with a diameter of 2.7 mm, the groove width W and the groove interval I of the groove 4 are both 5 μm, and the groove depth D is 600 nm.
[0067] Set the crystal vibrator 3 in an aluminum block with an automatic stirring function and a temperature regulator as a sensor 5, such as Figure 4 As shown, a network analyzer 7 for frequency measurement is connected to a π circuit 6 , and a...
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Abstract
Disclosed is a quartz oscillator, and a measurement method using the same, which make it possible to measure only the density of a solution, or to measure the density and viscosity simultaneously, by means of a quartz oscillator equipped with one detection unit. Electrodes are provided on both sides of a piezoelectric plate, a substance to be measured is brought into contact with a quartz oscillator in which an uneven surface is formed on the electrode or the detection unit of an electrode on the side that comes into contact with the substance to be measured, the quartz oscillator is caused to oscillate, and the density of the aforementioned substance is measured by measuring the amount of change in a frequency (f2) that corresponds to the high-frequency side of two frequencies that represent a value that is half of the maximum value of the conductance of the aforementioned quartz oscillator.
Description
technical field [0001] The present invention relates to a crystal resonator capable of measuring only the density of a solution alone, or simultaneously measuring density and viscosity, and a measurement method using the crystal resonator. Background technique [0002] The QCM (Quartz Crystal Microbalance) method, which utilizes the resonance phenomenon of crystal oscillators, is a method that can detect extremely small mass changes with a simple device, and it can be measured not only in the gas phase but also in the liquid phase. Therefore, it is widely used as a gas sensor, a film thickness sensor, a chemical sensor, a biosensor for measuring the interaction of biological substances such as DNA / protein, etc. [0003] In the conventional QCM method, various measurements are performed by measuring a resonance frequency obtained by oscillation, or a resonance frequency obtained by sweeping a frequency with an impedance analyzer, a network analyzer, or the like. [0004] In ...
Claims
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IPC IPC(8): G01N5/02G01N9/00G01N11/16
CPCG01N29/036G01N2291/0426G01N2291/02818G01N29/022G01N11/16G01N9/002G01N9/00G01R1/00G01N29/2437
Inventor 市桥素子伊藤敦
Owner ULVAC INC