Substrate liquid processing device and substrate liquid processing method
A technology for liquid processing and substrate processing, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as electrostatic breakdown, and achieve the effect of preventing electrostatic breakdown
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[0041]The specific structure of the substrate liquid processing apparatus, the substrate liquid processing method used in the substrate liquid processing apparatus, and the substrate liquid processing program for causing the substrate liquid processing apparatus to perform liquid processing on a substrate according to the present invention will be described below with reference to the accompanying drawings. .
[0042] Such as figure 1 As shown, a substrate loading and unloading table 4 is formed at the front end of the substrate liquid processing apparatus 1, and the substrate loading and unloading table 4 collects a plurality of (for example, 25) substrates 2 (here, semiconductor wafers) on a carrier 3 to carry out loading and unloading. , and a substrate transport chamber 5 is formed at the rear of the substrate loading and unloading table 4. The substrate transport chamber 5 is used to transport the substrates 2 accommodated on the carrier 3 piece by piece. The substrate ...
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