Semiconductor photoresist cleaning agent
A technology of photoresist and cleaning agent, which is applied in the fields of optics, photomechanical equipment, photosensitive material processing, etc.
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[0012] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer and clearer, the present invention will be further described in detail below in conjunction with the embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0013] A semiconductor photoresist cleaning agent is described below in conjunction with the embodiments, which includes alcohol amine, C4-C6 polyhydric alcohol, solvent, organic base and additives.
[0014] Wherein, the alcohol amine is monoethanolamine, diethanolamine, triethanolamine, n-propanolamine, isopropanolamine, ethanol, ethyldiethanolamine, and diglycolamine or a combination of two or more substances ;
[0015] Among them, the C4-C6 polyols are threose, arabinose, xylose, ribose, ribulose, xylulose, glucose, mannose, galactose, tagatose, allose, altrose, edulose Sug...
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