Ultraprecise free-form surface turning method of actively counteracting errors
An ultra-precise, motion error technology, used in automatic control devices, metal processing equipment, metal processing mechanical parts, etc., can solve problems such as low processing accuracy and poor surface quality
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[0043] Such as figure 1 As shown, the workpiece 1 is installed on the fixture 2 at the front end of the spindle of a two-axis ultra-precision CNC lathe, and a two-degree-of-freedom FTS device 3 is installed on On the shaft carriage 4, the diamond tool 5 is clamped on the two-degree-of-freedom FTS device 3, and the ultra-precision CNC lathe axis and The shafts are in a "T" configuration. A high-precision rotary grating 6 is installed at the end of the spindle to detect the spindle rotary pulse, high-precision Axis linear grating 7, 8 axis linear gratings are used to detect axis with Coordinate position of axes, high resolution Displacement sensor 9, Displacement sensors 10 are used to detect FTS devices respectively and The reciprocating motion of the shaft, the temperature sensors 11, 12, 13 are installed on the ultra-precision CNC lathe to detect temperature changes, and these detection signals are fed into a high-performance multi-axis motion controller 1...
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