Liquid suspension and powder of cerium oxide particles, methods for making same and uses thereof in polishing

A cerium oxide, suspension technology, applied in the field of polishing, can solve the problem of complex development of suspension

Active Publication Date: 2011-07-20
RHODIA OPERATIONS SAS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] It is therefore understandable that the development of these suspensions is a complex issue

Method used

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  • Liquid suspension and powder of cerium oxide particles, methods for making same and uses thereof in polishing
  • Liquid suspension and powder of cerium oxide particles, methods for making same and uses thereof in polishing
  • Liquid suspension and powder of cerium oxide particles, methods for making same and uses thereof in polishing

Examples

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preparation example Construction

[0049] The method for preparing the suspension of the present invention will now be described.

[0050] The suspensions of the invention can be prepared by a process comprising the following steps:

[0051] - (a) preparing a solution of a cerium III salt also comprising a colloidal dispersion of cerium IV;

[0052] - (b) bringing the solution into contact with a base under an inert atmosphere, whereby a precipitate is obtained;

[0053] - (c) subjecting the medium obtained in the previous step to a heat treatment under an inert atmosphere, at least one of the steps (a), (b) or (c) being carried out in the presence of nitrate ions;

[0054] - (d) acidifying and washing the medium thus obtained, successively but in any order, whereby a suspension is obtained.

[0055] The first step (a) of the above method thus consists in preparing the starting solution, which is a solution of the cerium III salt.

[0056] As cerium III salts it is possible more particularly to use nitrates,...

Embodiment 1

[0102] A starting solution was prepared by adding 830.6 g of a 2.88M solution of trivalent cerium nitrate (d=1.715) and 740 mg of a 0.70 M colloidal solution of cerium oxide with a particle size of 6 nm as determined by DQEL (d=1.115). will have a Ce of 1 / 3000 4+ / C 全部 The molar ratio of this solution was charged into a semi-closed container, and then degassed under vigorous stirring and nitrogen bubbling for 2 hours.

[0103] A dilute aqueous ammonia solution was prepared by adding 5041.0 g of deionized water and 423.9 g of 28% ammonia in water. The solution was charged to a semi-closed 6-liter jacketed reactor, which was then subjected to stirring and nitrogen sparging for 2 hours.

[0104] The previously prepared starting solution was then added to this dilute aqueous ammonia solution at ambient temperature over 30 min with stirring and a nitrogen purge.

[0105] Still under the nitrogen purge, the temperature of the reaction mixture was then raised to 85°C over 3 / 4 hour a...

Embodiment 2

[0114] The suspension obtained in Example 1 was diluted to CeO by adding deionized water 2 Calculated as 20% by weight. 100 g of this suspension were added to a solution of 100 g of polyacrylic acid (PAA) of molar mass Mw = 2000 g / mol under stirring, diluted so that the final PAA / CeO 2 The ratio is 1.2% by weight. The pH of the suspension thus obtained was brought back to 8 by adding 28% aqueous ammonia.

[0115] A value of 1.7 was adopted as CeO 2 Optical index in water, using Horiba LA910 laser particle size analyzer to measure the size of secondary particles. Median size d 50 112nm. Based on d of 93, 112 and 140nm respectively 10 、d 50 and d 90 The calculated dispersion index σ / m was 0.2.

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Abstract

The invention relates to a suspension of cerium oxide particles, of which the particles (secondary particles) have an average size of at most 200 nm, these secondary particles consisting of primary particles whose average size measured by TEM is of at most 150 nm with a standard deviation of at most 30% of the value of said average size, and for which the ratio of the average size measured by TEM to the average size measured by BET is at least 1.5. This suspension is prepared from a solution of a cerium III salt, comprising a colloidal dispersion of cerium IV, which is brought into contact, in the presence of nitrate ions and under an inert atmosphere, with a base; the medium obtained is subjected to a thermal treatment under an inert atmosphere and then acidified and washed. The suspension can be used for polishing.

Description

technical field [0001] The invention relates to liquid suspensions and powders of cerium oxide particles, a process for their preparation and their use especially in polishing. Background technique [0002] The development of the electronics industry requires the increasing use of compositions for polishing various components such as disks or dielectric compounds. These compositions are in the form of suspensions and they must meet certain characteristics. For example, they must provide high material removal rates, which reflect their grinding capabilities. They must also have as low a defectivity as possible; the term "defectiveness" refers in particular to the rate of scratches that the substrate has once treated with the composition. [0003] For reasons of stability and ease of use, these suspensions must be composed of particles of submicron size, ie typically less than 300 nm. In addition, the presence of too fine particles in these suspensions reduces their grindin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K3/14C09G1/02C01F17/00C01F17/235C09D7/61
CPCC01P2006/12C09G1/02C01F17/0043C09K3/1472C09K3/1436C01P2004/64C01P2006/22C01P2004/03C01P2004/50C01P2004/52C01P2004/62C09K3/1463B82Y30/00A61K2800/413C09D7/61C09D7/68A61K8/0241A61K8/19A61Q17/04B24B37/044C08K2003/2213C01F17/235C01F17/10C01P2002/01A61K8/044A61K2800/10C08K3/22C09G1/04
Inventor G·克里尼埃L·梯也尔
Owner RHODIA OPERATIONS SAS
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