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Filament renewing method and device

A filament, deionized water technology, applied in defective lamp/lamp repair/regeneration, recycling technology, electronic waste recycling, etc. Improve resource utilization and clear images

Inactive Publication Date: 2011-08-03
PEKING UNIV FOUNDER GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Usually, the temperature of the filament in the thermal field emission mode can be maintained at 1800 degrees, and the service life is only 1-3 years. As the filament ages, the electron beam emitted by the filament will become smaller and smaller, resulting in the inability to obtain high-definition images for the scanning electron microscope
The only existing solution is to replace the new filament to restore the electron beam current, resulting in a waste of resources

Method used

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  • Filament renewing method and device
  • Filament renewing method and device
  • Filament renewing method and device

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Embodiment Construction

[0029] Those skilled in the art have found that the main reasons affecting the life of the filament are: 1. The surface of the filament is oxidized, or there is adsorption of impurities inside the cavity; 2. The filament is passivated after working for a long time.

[0030] After analyzing a large number of replaced filaments, it was found that only a small part of the filaments were replaced due to passivation, and most of the filaments were due to surface oxidation or the adsorption of impurities inside the cavity that could not generate a large enough electron beam current, rather than Because the passivation is replaced, a great waste of resources is formed.

[0031] In order to achieve the purpose of multiple utilization of the filament, save resources, and improve resource utilization, the embodiment of the present invention provides a filament refurbishment method, the specific processing flow is as follows figure 1 shown, including:

[0032] Step 101, taking out the a...

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PUM

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Abstract

The invention discloses a filament renewing method, which comprises the following steps of: taking an aged filament out of a cavity of an electron gun; fixing the aged filament, soaking the fixed filament into boiled de-ionized water, and heating the filament for first time; taking the heated filament out of the boiled de-ionized water, putting the filament into a cleaning tank, fixing the filament, and ultrasonically cleaning the filament for second time by using the de-ionized water; and taking the cleaned filament out of the cleaning tank, drying the filament and then mounting the filamentinto the cavity of the electron gun. The invention also discloses a filament renewing device. By the method and the device, the filament can be used for many times, so that resources are saved, and the utilization ratio of the resources is improved.

Description

technical field [0001] The invention relates to the fields of semiconductor manufacturing and material analysis and processing, in particular to a filament refurbishment method and a filament refurbishment device. Background technique [0002] In the current field of semiconductor manufacturing and material analysis and processing, in order to obtain higher microscopic magnification capabilities and high-resolution images, scanning electron microscopes have emerged as the times require. [0003] The imaging principle of the scanning electron microscope is as follows: [0004] After the electron gun is processed by loading high voltage, electrons are emitted from the filament to generate electron beams, and the generated electron beams are used to bombard the surface of the sample at high speed, generating electron displacement on the surface of the sample, forming secondary electron scattering, and then obtaining high-magnification images through photoelectric signal convers...

Claims

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Application Information

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IPC IPC(8): H01J9/50
CPCY02W30/82
Inventor 高健
Owner PEKING UNIV FOUNDER GRP CO LTD