Method and device for measuring multiple element parameters in differential con-focus interference manner

A differential confocal and interference element technology, which is used in measurement devices, geometric characteristics/aberration measurement, and optical devices, etc., to achieve the effects of improving fixed focus accuracy, fast measurement speed, and improving measurement efficiency

Active Publication Date: 2011-08-10
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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Problems solved by technology

[0013] The purpose of the present invention is to solve the problem of simultaneously measuring multiple parameters of the component with high precision and measuring the surface shape of the component, and propose a method combining differential confocal (confocal) detection technology and surface shape interferometry technology , using the high-precision positioning characteristics of the differential confocal (confocal) detection system to realize the measurement of the radius of curvature of the surface of the spherical element, the measurement of the top focal length of the lens, the measurement of the refractive index and thickness of the lens, and the measurement of the axial gap of the lens group, using the surface interferometry system Realize component surface shape measurement

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  • Method and device for measuring multiple element parameters in differential con-focus interference manner
  • Method and device for measuring multiple element parameters in differential con-focus interference manner
  • Method and device for measuring multiple element parameters in differential con-focus interference manner

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Embodiment 1

[0079] When the measured parameter is the radius of curvature of the convex sphere, as attached Figure 10 As shown, the differential confocal interferometric element multi-parameter measurement device, the measurement steps are:

[0080] (a) Start the measurement software in the main control computer 32, turn on the laser 37, and the light emitted by the laser 37 is transmitted through the optical fiber 38 to form a point light source 1. The light emitted by the point light source 1 forms a measuring beam 5 after passing through the first beam splitter 2, the collimating lens 3 and the converging lens 4;

[0081] (b) The measured spherical element 18 is fixed on the five-dimensional adjustment frame 39, the measuring beam 5 is irradiated on the measured spherical element surface 49, and the light reflected by the measured spherical element surface 49 passes through the converging lens 4 and the collimating lens After 3, it is reflected by the first beam splitter 2 and shoots...

Embodiment 2

[0091] When the measured parameter is the top focal length of the convex lens, as attached Figure 11 As shown, the differential confocal interferometric element multi-parameter measurement device, the measurement steps are:

[0092] (a) Start the measurement software in the main control computer 32, turn on the laser 37, and the light emitted by the laser 37 is transmitted through the optical fiber 38 to form a point light source 1. The light emitted by the point light source 1 passes through the first beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0093] (b) Take off the condensing lens 4, place the measured lens 17 at the parallel optical path where the collimating lens 3 exits, adjust the measured lens 17 so that it has a common optical axis with the collimating lens 3, and the parallel light passes through the measured lens 17 After forming the measurement beam 5;

[0094] (c) plane reflector 19 is fixed on the five-dimensional adjustment frame 39,...

Embodiment 3

[0101] When the measured parameters are the refractive index and thickness of GCL-0101K9 plano-convex lens, as attached Figure 12 As shown, the differential confocal interferometric element multi-parameter measurement device, the measurement steps are:

[0102] (a) Start the measurement software in the main control computer 32, turn on the laser 37, and the light emitted by the laser 37 is transmitted through the optical fiber 38 to form a point light source 1. The light emitted by the point light source 1 forms a measuring beam 5 after passing through the first beam splitter 2, the collimating lens 3 and the converging lens 4;

[0103] (b) Fix the measured lens 17 on the five-dimensional adjustment frame 39, fix the plane reflector 19 behind the measured lens 17, adjust the measured lens 17 so that it has a common optical axis with the measuring beam 5, and adjust the plane reflector 19, making it perpendicular to the optical axis of the measuring beam 5;

[0104] (c) The ...

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Abstract

The invention relates to a method and device for measuring multiple element parameters in differential con-focus (con-focus) interference manner, belonging to the technical field of optical precise measurement. The core thought of the invention is as follows: a differential con-focus (con-focus) measurement system is used for measuring the surface curvature radius of a spherical element, the vertex focal distance of a lens, the refraction index of a lens, the thickness of the lens and the axial clearance of a lens group, and a facial-contour interference measurement system is used for measuring the facial contour of an element surface to realize simultaneous measurement on multiple parameters of an element and high measurement precision. In the invention, the differential con-focus (con-focus) measurement system and the facial-contour interference measurement system are fused for the first time to measure parameters comprehensively; and in the process of measuring the multiple parameters of the element, a light path is unnecessary to regulate and a measured element is unnecessary to detach, thus, the measured element is not damaged and the measurement speed is high.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement and can be used for measuring multiple parameters and surface shapes of components with high precision. technical background [0002] In the field of optical precision measurement, the high-precision measurement of various parameters of components is of great significance. There are many types of component parameters, such as the radius of curvature of the surface of the spherical component, the refractive index of the lens material, the central thickness of the lens, the axial gap of the lens group, and the surface shape of the component, etc., and these parameters are in the process of optical components. It is very important, and its processing quality will have a great impact on the imaging quality of the optical system. Especially in high-performance optical systems such as lithography machine objective lenses and aerospace cameras, there are often extremely strict requ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/255G01B11/06G01B11/14G01N21/45G01M11/02
CPCG01B11/2441G01B11/06G01M11/0271G01B11/255G01B11/14G01M11/025
Inventor 赵维谦杨佳苗邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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