Air floating big-calibre plane optical element polishing clamp

Abstract

The invention discloses an air floating big-calibre plane optical element polishing clamp, relating to a polishing clamp. The air floating big-calibre plane optical element polishing clamp can clamp a workpiece in the big-calibre plane optical element polishing process, and causes the pressure on the workpiece to be evenly distributed. The air floating big-calibre plane optical element polishing clamp is provided with a connecting shaft, a base, a sealed chamber, an air sac, an air cushion, a rubber film, four clamping jaws and a pressure control device, wherein one end of the connecting shaft is connected with the upper surface of the base; the other end of the connecting shaft is externally connected with a machine tool polishing rotary shaft; the lower surface of the base is connected with the sealed chamber; the air sac, the air cushion and the rubber film are successively arranged in the sealed chamber from top to bottom; the air inlet of the upper surface of the air sac is connected with a pressure control device via a through hole arranged on the base; the lower surface of the air sac and the upper surface of the air cushion are tightly adhered; the base is provided with four clamping jaw fixing grooves; four clamping jaws are respectively fixed in the four clamping jaw fixing grooves; and each clamping jaw fixing groove is provided with at least two tapped holes for assembling and disassembling clamping jaws or causing the clamping jaws to position workpieces.

Description

technical field [0001] The invention relates to a polishing jig, in particular to a polishing jig for a large-diameter flat optical element. Background technique [0002] The continuous development of modern science and technology requires more and more ultra-precision surfaces. The so-called high-precision surfaces usually refer to surfaces with an accuracy of 0.3-0.03 μm, and the corresponding processing technology is called high-precision surface processing technology. Nowadays, many large-scale systems require a large number of large-diameter and high-precision planar optical components. The processing technology of large-diameter optical components is complex and difficult. The development of advanced optical manufacturing technology to improve the processing quality and production efficiency of large-scale high-precision optical components is to ensure optical The key to the smooth implementation of the project. The polishing technology based on improving the surface ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a device that can realize the process of polishing large-diameter optical elements for the situation that the uneven pressure on the back of the workpiece affects the polishing accuracy of the plane optical elements. It is an air-floating polishing fixture for large-aperture flat optical elements that makes the pressure evenly distributed throughout the workpiece

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