Magnetic-suspension planar feed motion device

Abstract

The invention discloses a magnetic-suspension planar feed motion device, which is characterized in that a planar motor is adopted to drive; a stator platform is provided with a square raised head array stator which is formed by silicon sheets evenly; a Y-direction movable platform is provided with two sets of mutually orthorhombic three-phase exciting winding rotors; magnetic-suspension sliding sleeves in two directions are used for supporting a rotor platform respectively; the magnetic-suspension sliding sleeves are arranged on cylindrical guides in the X and Y directions; coil currents in the magnetic-suspension sliding sleeves are controlled to suspend the rotor platform, thus improving the stability and the efficiency of planar motion; excitation voltages are exerted on the three-phase exciting winding rotors by regulation to generate electromagnetic driving power so as to control the planar motion direction of the rotor platform; and grating sensors in two motion directions are utilized to detect motion positions so as to realize accurate planar feed motion. The magnetic-suspension planar feed motion device can be applied to special equipment for manufacturing photoelectrons, micro-electronics and the like, and has wide market prospects.

Description

technical field [0001] The invention relates to a two-coordinate plane motion device, in particular to a magnetic levitation plane feed motion device. Background technique [0002] The traditional planar feed movement device is formed by superimposing two rotating motors in the coordinate direction through the transformation of the linear motion conversion mechanism into a linear motion. Due to a series of problems such as friction, backlash, and deformation in the linear motion conversion mechanism, it is difficult to achieve a high level of precision, and the driving efficiency is not high, and the dynamic response speed is slow. In recent years, linear motors have begun to be used in two-dimensional planar positioning devices. However, this positioning device still adopts the superposition mode of single-dimensional motion mechanisms, which is difficult to meet the needs of ultra-precision modern processing equipment for the manufacture of optoelectronics, microelectronic...

AI Technical Summary

Problems solved by technology

Due to a series of problems such as friction, backlash, and deformation in the linear motion conversion mechanism, it is difficult to achieve a high level of precision, and the driving efficiency is not high, and the dynamic response speed is slow

In recent years, linear motors have begun to be used in two-dimensional plane positioning devices. However, this positioning device still adopts the superposition mode of single-dimensional motion mechanisms, which is difficult to meet the needs of ultra-precision modern processing equipment for the manufacture of optoelectronics, microelectronics and other products.

Images