Device and method for integrally modifying membrane module by using remote plasma
A remote plasma and plasma technology, applied in chemical instruments and methods, membrane technology, semi-permeable membrane separation, etc., can solve the problem of inability to scale the membrane module modification, and achieve the purpose of strengthening the chemical reaction caused by free radicals and controlling the Responsiveness, the effect of improving efficiency
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Embodiment 1
[0034] A device of the present invention that uses remote plasma to modify the membrane assembly as a whole, such as figure 1 As shown, it includes a vacuum pump 12, a membrane module 10, a discharge tube 4, a gas storage tank 1, an inductance coil 5 wound on the discharge tube, a radio frequency matching device 6 connected to the inductance coil, and a radio frequency power supply 7. The air intake of the discharge tube 4 The hole is connected to the gas storage tank 1 through the pressure reducing valve 2 and the flow controller 3, and a vacuum gauge 8 is arranged on the pipeline between the discharge tube 4 and the membrane module 10; The axial air inlet / liquid hole 101 on the air inlet side of the membrane module is connected to the lateral air inlet / liquid hole 102 by pipelines, and the axial air outlet / liquid hole 104 and the side air outlet / liquid hole 103 on the air outlet side of the membrane module are simultaneously The three-way control valve 11 is connected with t...
Embodiment 2
[0037] A device of the present invention that uses remote plasma to modify the membrane module as a whole has the same structure as in Example 1. The device is used to modify the outer surface of the hollow fiber membrane module made of polyvinylidene fluoride:
[0038] Adjust the three-way control valve A9 so that the air outlet hole of the discharge tube 4 is closed to the axial air inlet / liquid hole 101 of the membrane module 10, and the air outlet hole of the discharge tube 4 is opened to the lateral air / liquid hole 102 of the membrane module 10; The three-way control valve B11 closes the axial gas / liquid hole 104 of the membrane module 10 to the vacuum pump 12, and the side gas / liquid hole 103 of the membrane module 10 opens to the vacuum pump 12; the gas stored in the gas storage tank 1 is used to generate plasma The non-polymerizable gas in the body is nitrogen; by adjusting the flow controller 3 at the front end of the vacuum pump 12 and the discharge tube 4, the air pr...
Embodiment 3
[0040] A device of the present invention that uses remote plasma to modify the membrane module as a whole has the same structure as in Example 1. The device is used to simultaneously modify the inner and outer surfaces and membrane pores of the hollow fiber membrane module made of polypropylene material: adjustment The three-way control valve A9 makes the air outlet hole of the discharge tube 4 open to the axial air inlet / liquid hole 101 of the membrane module 10, and the air outlet hole of the discharge tube 4 is closed to the lateral air inlet / liquid hole 102 of the membrane module 10; adjust The three-way control valve B11 closes the axial gas / liquid hole 104 of the membrane module 10 to the vacuum pump 12, and the side gas / liquid hole 103 of the membrane module 10 opens to the vacuum pump 12; the gas stored in the gas storage tank 1 is used to generate plasma The non-polymerizable gas in the body is ammonia; by adjusting the flow controller 3 at the front end of the vacuum ...
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