Furnace cover observation window of silicon single crystal furnace
An observation window, silicon single crystal technology, applied in the direction of single crystal growth, crystal growth, post-processing devices, etc., can solve the problems of limiting the depression angle of the camera and the existence of blind spots for observation, and achieve the effect of convenient installation and debugging
Inactive Publication Date: 2011-09-14
无锡市惠德晶体控制设备有限公司
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Problems solved by technology
The design of the observation window of the traditional silicon single crystal furnace cover will limit the depression angle of the camera, and there will be a blind spot for observation
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[0014] Please refer to image 3 and Figure 4 as shown, image 3 It is a top view of the observation window of the silicon single crystal furnace cover of the present invention, Figure 4 It is a side view of the observation window of the silicon single crystal furnace cover of the present invention. In this embodiment, a silicon single crystal furnace cover observation window includes a first observation window 20 and a second observation window 21 arranged on the silicon single crystal furnace cover 2, the first observation window 20 and the second observation window 21 are all arranged on the horizontal direction of the plane where the furnace cover 2 is located, and two cameras 3 are arranged at the window of the first observation window 21, and the camera 3 is arranged side by side along the radial line of the furnace cover 2, And the first observation window 20 and the second observation window 21 are both elliptical structures.
[0015] The first observation window ...
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The invention discloses a furnace cover observation window of a silicon single crystal furnace. The observation window comprises a first observation window and a second observation window which are arranged on a furnace cover of the silicon single crystal furnace; both the first observation window and the second observation window are arranged on a horizontal direction of a plane in which the furnace cover is located; two cameras are arranged at the window position of the first observation window; the cameras are arranged along the radial line of the furnace cover in parallel; the first observation window and both the second observation window of the furnace cover observation window of the silicon single crystal furnace are arranged on the horizontal direction of the furnace cover; and the two cameras are arranged at the window position of the first observation window along the radial line of the furnace cover in parallel to make the depression angle of the first observation window to the cameras wide. Therefore, the observation window can be suitable for different process environments, and the installation and commissioning of a camera are simultaneously convenient.
Description
technical field [0001] The invention relates to a silicon single crystal furnace cover, in particular to an observation window for a silicon single crystal furnace cover. Background technique [0002] see figure 1 and figure 2 as shown, figure 1 It is a top view of the observation window of the traditional silicon single crystal furnace cover, figure 2 It is a side view of a traditional silicon single crystal furnace cover observation window. The traditional silicon single crystal furnace cover 1 is respectively provided with a first observation window 10 and a second observation window 11. The first observation window 10 is used to utilize The camera 3 observes, the second observation window 11 is used for manual observation, and the first observation window 10 is arranged on the vertical direction of the furnace cover 1, and the second observation window 11 is arranged on the horizontal direction of the furnace cover 1, Generally, two cameras are arranged at the firs...
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IPC IPC(8): C30B35/00C30B15/26
Inventor 惠梦君
Owner 无锡市惠德晶体控制设备有限公司