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Semiconductor chip and semiconductor package with stacked chip structure

A semiconductor and chip technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve problems such as electrical short circuit, chip failure, conductive metal damage, etc.

Inactive Publication Date: 2011-11-30
SK HYNIX INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the substrate is warped, it is more difficult to align the TSVs accurately
If misalignment occurs between these TSVs or distortion of the substrate occurs, the conductive metal used to transmit and receive signals may be destroyed or electrically shorted
As a result, the chip may not function properly

Method used

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  • Semiconductor chip and semiconductor package with stacked chip structure
  • Semiconductor chip and semiconductor package with stacked chip structure
  • Semiconductor chip and semiconductor package with stacked chip structure

Examples

Experimental program
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Embodiment Construction

[0019] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, these examples are for illustration only and are not intended to limit the scope of the present invention.

[0020] As described above, in order to realize a stack chip package, a structure including TSVs in each semiconductor chip of a wafer has been proposed. The TSVs are electrically connected to bonding pads within the semiconductor chip, and the semiconductor chips are physically and electrically connected in a vertical direction through the TSVs. Thus, a stacked chip package is fabricated. Embodiments of the present invention relate to semiconductor chips and semiconductor package structures that can be effectively applied to fabricate stacked chip packages.

[0021] 2A to 2D are cross-sectional views illustrating a semiconductor chip including an alignment pattern according to an exemplary embodiment of the present invention.

[0022] Each ...

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PUM

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Abstract

A semiconductor chip and semiconductor package with stack chip structure include align patterns. The align patterns are formed of magnetic materials having opposite polarities on the top and bottom of the semiconductor chip. Thus, when the plurality of chips are stacked on the substrate in order for the packaging, the semiconductor chips may be exactly aligned by the magnetic force between the align patterns of the vertically stacked chips. The semiconductor package includes a plurality of stacked semiconductor chips and a filling material. Each of the stacked semiconductor chips includes a semiconductor substrate having a first surface and a second surface, wherein a circuit pattern such as a bonding pad is formed on the first surface, and a first align pattern formed on the first surface of the semiconductor substrate, wherein the first align pattern is formed of a magnetic material.

Description

technical field [0001] Exemplary embodiments of the present invention relate to a semiconductor package, and more particularly, to a semiconductor chip applicable to a stacked chip package, and a semiconductor package having a stacked chip structure. Background technique [0002] Recently, with the increasing demand for small, high-performance and mobile electronic products, the demand for ultra-small, high-capacity semiconductor memory devices is increasing. In general, the storage capacity of a semiconductor memory device can be increased by a method of increasing the integration degree of a semiconductor chip or a method of mounting and assembling a plurality of semiconductor chips in a single semiconductor package. The former requires a lot of energy, capital and time, while the latter can easily increase the storage capacity of the semiconductor memory by changing the packaging method. In addition, compared with the former, the latter is more favorable in terms of requ...

Claims

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Application Information

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IPC IPC(8): H01L23/544H01L23/538
CPCH01L24/81H01L2924/01074H01L23/481H01L2225/06513H01L25/50H01L2224/81903H01L23/3107H01L2224/0401H01L2924/014H01L2224/05009H01L2924/01029H01L2224/73204H01L23/544H01L2225/06593H01L2224/831H01L2224/81132H01L2924/01013H01L2924/01033H01L24/83H01L2224/16146H01L2224/8113H01L24/32H01L2224/32225H01L2224/32146H01L2225/06541H01L24/05H01L24/13H01L2223/54426H01L2224/81201H01L24/16H01L23/3135H01L2224/16238H01L2224/02372H01L24/02H01L25/0657H01L21/563H01L2924/01006H01L2223/5446H01L2224/13009H01L2224/10165H01L2924/14H01L2924/00H01L2224/16225H01L2224/16145H01L2224/32145
Inventor 赵胜熙金圣哲
Owner SK HYNIX INC