Semiconductor chip and semiconductor package with stacked chip structure
A semiconductor and chip technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve problems such as electrical short circuit, chip failure, conductive metal damage, etc.
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[0019] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, these examples are for illustration only and are not intended to limit the scope of the present invention.
[0020] As described above, in order to realize a stack chip package, a structure including TSVs in each semiconductor chip of a wafer has been proposed. The TSVs are electrically connected to bonding pads within the semiconductor chip, and the semiconductor chips are physically and electrically connected in a vertical direction through the TSVs. Thus, a stacked chip package is fabricated. Embodiments of the present invention relate to semiconductor chips and semiconductor package structures that can be effectively applied to fabricate stacked chip packages.
[0021] 2A to 2D are cross-sectional views illustrating a semiconductor chip including an alignment pattern according to an exemplary embodiment of the present invention.
[0022] Each ...
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