Furnace tube ignition method

A furnace tube and ignition chamber technology, applied in the direction of combustion ignition, combustion method, igniter equipped with fuel, etc., can solve the problems of affecting production efficiency, product wafer scrapping, high ignition failure rate, etc., to improve the ignition success rate, loss avoidance effect

Inactive Publication Date: 2011-12-21
ADVANCED SEMICON MFG CO LTD
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Problems solved by technology

However, in actual production and application, according to statistics, if the mixing ratio of the ignition process is adopted, the ignition failure rate is as high as about 2%.
The high ignition failure rate often leads to the scrapping of batches of product wafers in the furnace tube, which seriously affects the production efficiency and increases the production cost

Method used

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Embodiment Construction

[0016] In the prior art, the ignition mixing ratio of the ASM400 atmospheric pressure furnace tube is generally the ratio of hydrogen to oxygen is 1:2, but the failure rate of ignition is relatively high under this ratio, and it will be used in batch industrial production. cause greater losses.

[0017] In the furnace tube ignition method of the embodiment of the present invention, the ratio of hydrogen and oxygen passed into the ignition chamber of the furnace tube during the ignition process ranges from 1:2.5 to 1:2.7, and the use of this ratio can effectively improve the success rate of ignition , to reduce or avoid losses caused by ignition failure.

[0018] Further, the embodiment of the present invention optimizes the ignition conditions of the ASM400 atmospheric pressure furnace tube. The gas ratio of the ignition chamber during the ignition process is: hydrogen 26%-28%, oxygen 66%-68, dichloroethylene 4 % to 6%, thus reducing the ignition success rate of the ASM400 at...

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Abstract

The invention provides a method for igniting a furnace tube. During the ignition process, the ratio of hydrogen and oxygen passed into the ignition chamber of the furnace tube is in the range of 1:2.5 to 1:2.7. The invention is beneficial to reduce the ignition failure rate and improve the stability and reliability of mass production.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a furnace tube ignition method. Background technique [0002] In the wet oxygen process, especially in the process of forming the gate oxide layer, the requirements for the ignition step of the furnace tube are very high. If the ignition fails, the process will be interrupted, which will affect the entire batch of products in the furnace tube, and may even lead to the scrapping of a large number of products, which will seriously affect the yield, production capacity and cost. [0003] In the prior art, taking the ASM400 type atmospheric pressure furnace tube as an example, usually the hydrogen (H 2 ) and oxygen (O 2 ) in a ratio of 1:1. However, in actual production and application, according to statistics, if the mixing ratio of the ignition process is adopted, the ignition failure rate is as high as about 2%. A high ignition failure rate often leads to the scrapping ...

Claims

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Application Information

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IPC IPC(8): F23Q2/16H01L21/02H01L21/28
Inventor 陈秀伟闵亚能许亮敖海林高玉岐
Owner ADVANCED SEMICON MFG CO LTD
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