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Method of producing a component of a device, and the resulting components and devices

A web, flexible technology, applied in the direction of cleaning methods and appliances, electrical components, chemical instruments and methods, which can solve the problems of expensive treatment processes

Inactive Publication Date: 2013-11-20
3M INNOVATIVE PROPERTIES CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, performing this continuous web handling process in a clean room environment can be expensive

Method used

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  • Method of producing a component of a device, and the resulting components and devices
  • Method of producing a component of a device, and the resulting components and devices
  • Method of producing a component of a device, and the resulting components and devices

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0082] Preparation is usually as figure 2 Experimental setup shown. Under the trade name 597197 Scotchpar Films Indefinite length webs of 9 inch (22.9 cm) wide, 0.002 inch (0.05 mm) thick polyethylene terephthalate (PET) commercially available from 3M Company (St. Paul, MN) 20 was conveyed around stainless steel backup rolls 30 at a line speed of 25 ft / min (7.6 m / min). A slot film coater 26 was provided that included a die opening configured for a slot height of 0.010 inches (0.25 mm) and a slot width of 8 inches (20.3 cm). The die coater 26 was operated at a coat gap of 0.010 inches (0.25 mm). Pump 1.5 inches of water column (0.0038kg / cm 2 ) vacuum.

[0083] including the trade name ALBERDINGK dissolved in water to 40% solids U 801 flowable polymer liquid material of aliphatic polyester polyurethane commercially available from Alberdingk Boley, Inc. (Greensboro, NC) is dispensed from pressure tank 32 . The flow rate was monitored by a flow meter 34 commercially avail...

example 2

[0086] The clean surface 28 of the coated web 20 of Example 1 ( Figure 1c ) of the surface particles. A representative area of ​​the clean surface 28 of the membrane 20 is exposed and verified. The exposed clean surface area was compared to an uncleaned portion of the same PET film web 20 . Examination of the exposed surface 28 indicated at least a 98% reduction in soluble particles.

example 3

[0088] The coated web of Example 1 was wound on a spool with a temporary pre-mask liner of the web inter-wound with the coated web to protect the back side of the web (i.e. the uncoated side of the web). cloth side). A 0.002 inch (0.05 mm) thick polyethylene protective film liner commercially available from Tredegar (Richmond, VA) under the trade designation Ultramask 3930 was used for this purpose, although many different liners are considered suitable.

[0089] see now image 3 , which generally describes the various stages used to implement the method of the present invention (such as Figure 1b The solidification phase described in , is similar to Figure 1c One embodiment of the multi-stage apparatus 70 for the cleaning layer removal stage described in , etc.). When the apparatus 70 is used to process a web of indefinite length (configured similarly to that of Example 3, i.e., having a cleaning layer 24b on one major surface, and an optional pre-mask liner 74 protectin...

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PUM

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Abstract

The present method comprises providing a flexible web substrate (e.g., polymeric flexible web substrates) that forms at least part of a component of a device, coating so as to wet-out on and cover all or a substantial portion of a major surface on one side or both sides of the flexible web substrate with flowable polymeric material, while the flexible web substrate is moving in a down-web direction, and solidifying the polymeric material so as to form one cleaning layer on the major surface of one side or both sides of the flexible web substrate. The present invention can be utilized in a continuous in-line manufacturing process. In applications of the present invention where the flexible web substrate will not form a component of a device, the present invention broadly provides a method for cleaning particles from a flexible web of indefinite length. Each cleaning layer forms a substantially adhesive bond to the major surface that is readily removable without damaging or leaving a substantial residue of cleaning layer material on the major surface. A substantial number of the particles that were on this major surface are captured by and removable with the cleaning layer.

Description

technical field [0001] The present invention relates to the preparation of elements for use in the manufacture of equipment, in particular to cleaning and protecting one or more surfaces of a substrate in preparation for subsequent processing, and more particularly to the preparation of flexible web substrates of indefinite length Such substrates, and even more particularly, relate to cleaning and protecting one or more surfaces of flexible web substrates as they move in the downweb direction, and to elements and apparatus resulting therefrom. Background technique [0002] It is well known that there are many manufacturing processes in which the smallest speck of debris, whether in the finished product or in the semi-finished product, can cause damage. As such, techniques are known for removing certain substances from these surfaces. Particles are rarely spherical with a single diameter, so the word "diameter" is commonly used to describe particle size. Typically, cleaning...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/302H01L21/50B08B1/20
CPCB08B7/0014H01L21/02096H01L51/0097Y02E10/549Y10T428/2848Y10T428/2839Y10T428/24521Y10T428/2804Y10T428/28Y10T428/24612Y10T428/31678Y10T428/31504Y02P70/50H10K77/111H01L21/302B05D1/26B05D3/007
Inventor 威廉·布莱克·科尔布威廉·R·达德利迈克尔·A·约翰逊史蒂芬·A·约翰逊克里斯·J·坦利
Owner 3M INNOVATIVE PROPERTIES CO