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Crystal growth furnace heater and sapphire crystal growth furnace

A crystal growth furnace and heater technology, applied in crystal growth, single crystal growth, single crystal growth, etc., can solve problems such as uneven temperature field of sapphire crystal furnace, achieve firm and reliable connection parts, high reliability, and improve balance Effect

Inactive Publication Date: 2012-02-08
江苏同人电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the relevant technical problems of the prior art, the object of the present invention is to provide a crystal growth furnace heater and a sapphire crystal growth furnace to improve the problem of uneven temperature field in the sapphire crystal furnace in the prior art

Method used

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  • Crystal growth furnace heater and sapphire crystal growth furnace
  • Crystal growth furnace heater and sapphire crystal growth furnace
  • Crystal growth furnace heater and sapphire crystal growth furnace

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Embodiment Construction

[0025] Specific embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0026] One aspect of the present invention provides a crystal growth furnace heater. The overall shape of the heater is cylindrical, such as figure 1 Shown is the front view of the heater. One end of the cylinder is provided with a plurality of electrodes 1, and according to an embodiment of the present invention, six electrodes 1 are provided. figure 2 It is a top view of the heater, six electrodes 1 are distributed in a ring, and every two electrodes 1 are divided into three groups, which are respectively connected to the output terminals of the three-phase power supply. For example, two adjacent electrodes 1 are divided into one group, and six electrodes 1 are divided into three groups a, b, and c, which are respectively connected to phase A, phase B, and phase C of the output terminals of the three-phase power supply.

[0027] According to an em...

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Abstract

The invention discloses a crystal growth furnace heater with a cylindrical shape. The heater comprises: a plurality of electrodes distributed annularly and arranged at one end of the cylinder; a connecting ring disposed at the other end of the cylinder; a tungsten wire mesh, one end of which is connected to each of the multiple electrodes, and the other end of which is connected to the connecting ring, thus forming a barrel cylinder. On the other hand, the invention provides a sapphire crystal growth furnace with the above heater. The heater of the invention employs a double-star loaded three-phase alternating-current power supply mode, and can improve the load balance. The tungsten wire mesh heating body can endow the heater with good uniformity, reliability and stability.

Description

technical field [0001] The invention relates to a crystal growth furnace heater and a sapphire crystal growth furnace. Background technique [0002] The heating methods used in the sapphire crystal growth furnaces in the prior art generally include direct current heating, alternating current heating, intermediate frequency induction heating and the like. Among them, the DC heating method is often used in the domestic Kyropoulos sapphire crystal growth process, and the AC heating method is often used in the sapphire crystal growth process imported from abroad. The intermediate frequency induction heating method uses coil induction to control the growth of sapphire crystals, but it is not suitable for the growth of large diameter sapphire crystals. [0003] Most of the above-mentioned AC heating methods use a birdcage heater connected to an external single-phase AC power supply as a heating body. In the production of birdcage heaters, the heating rods may have different cont...

Claims

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Application Information

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IPC IPC(8): C30B15/14C30B29/20
Inventor 盛建明王平胡董成张雪平
Owner 江苏同人电子有限公司
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