Attenuated total reflection (ATR) spectrum measurement type Fourier transform spectrometer based on integrated optical waveguide

Abstract

The invention provides an ATR spectrum measurement type Fourier transform spectrometer based on integrated optical waveguide. The spectrometer comprises an integrated optical waveguide electro-optical modulator, a voltage function generator, a broadband light source, a photoelectric detector, a signal processing chip and a fiber having an ATR sensitive window. According to the invention, light from the light source is coupled into the fiber, passes through an ATR sensitive window zone along the fiber and coupled into the integrated optical waveguide electro-optical modulator; voltage varying with time is applied on the integrated optical waveguide electro-optical modulator by using the voltage function generator, the intensity of output light of the integrated optical waveguide electro-optical modulator is measured by using the photoelectric detector simultaneously, and the signal processing chip connected with the photoelectric detector and the voltage function generator carries out Fourier transform processing on measured optical signals so as to obtain the spectrum of incident light. The spectrometer provided in the invention can determine visible-infrared absorption spectrum of solid, liquid and monomolecular layers adsorbed on the surface of the ATR sensitive window, has strong anti-interference capability and is applicable to on-site rapid quantitative detection.

Description

technical field [0001] The invention relates to the fields of micro-opto-electromechanical system (MOEMS) processing technology, integrated optical waveguide light modulation technology, optical fiber sensing technology and spectral measurement technology, and is a Fourier transform attenuated total reflection (ATR) spectrometer based on integrated optical waveguide technology And its on-site rapid identification and quantitative detection of biochemical substances. Background technique [0002] The spectrometer is a powerful tool for analyzing the composition, structure and content of substances. It has a wide range of applications in many fields such as atmospheric monitoring, water environment monitoring, food safety testing, product quality testing, chemical defense and anti-terrorism, biomedicine, petrochemicals, space exploration, and material research and development. application. A common spectrometer is a desktop Fourier transform infrared spectrometer based on a m...

AI Technical Summary

Problems solved by technology

However, these micro-Fourier micro-spectrometers are still composed of separate components, each component still needs to be precisely positioned, still contains moving parts, and the probe light is still a free beam in space, so it still has poor resistance to mechanical vibration, and its performance is vulnerable to environmental temperature, humidity, Interference from changes in air pressure and atmosphere

Moreover, the moving distance of the micro-moving mirror is small, which makes the spectral resolution low; the area of ​​the micro-moving mirror is small, so that the light flux is small, and the signal-to-noise ratio is reduced as a result.

It can be seen that the Fourier transform spectrometer based on the moving mirror Michelson interferometer also has many congenital deficiencies.

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