Radiofrequency power supply used for vacuum coating
A radio frequency power supply, vacuum coating technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of poor precision, unsatisfactory inter-chip uniformity, slow matching time, etc. Reasonable, fast matching time and improved inter-chip uniformity
Inactive Publication Date: 2012-03-28
沙晓林
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Problems solved by technology
[0002] The existing power supply for vacuum coating, due to the defects of the capacitive transmission parts, the matching time is slow, the precision is poor, and the uniformity between the chips is not ideal
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[0012] A radio-frequency power supply for vacuum coating comprises a matching capacitance transmission part, and the matching capacitance transmission part adopts a gear transmission part with a gear ratio of 2:15.
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The invention discloses a radiofrequency power supply used for vacuum coating. The radiofrequency power supply comprises a matching capacitance driving part, wherein the matching capacitance driving part is equipped with a gear driving part of which the gear ratio is 2:15. The radiofrequency power supply has the advantages of reasonable structure, short matching time and high precision, and intra-wafer uniformity can be effectively improved.
Description
technical field [0001] The invention relates to a power supply for vacuum coating. Background technique [0002] The existing power supply for vacuum coating has slow matching time, poor precision, and unsatisfactory inter-chip uniformity due to the defects of the capacitive transmission parts. Contents of the invention [0003] The object of the present invention is to provide a radio frequency power supply for vacuum coating with reasonable structure and good working performance. [0004] Technical solution of the present invention is: [0005] A radio frequency power supply for vacuum coating, including a matching capacitive transmission part, is characterized in that: the matching capacitive transmission part adopts a gear transmission part with a gear ratio of 2:15. [0006] The invention has the advantages of reasonable structure, fast matching time, high precision and effectively improved uniformity between slices. [0007] Table 1: Comparison of the effects of t...
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IPC IPC(8): C23C14/00
Inventor 沙晓林
Owner 沙晓林
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