TFT (thin film transistor)-LED (light-emitting diode) color array display base plate and manufacturing method thereof

Abstract

The invention discloses a TFT (thin film transistor)-LED (light-emitting diode) color array display base plate and a manufacturing method thereof. A semiconductor integrated process is adopted, and double TFTs and a light-emitting unit with three primary colors are jointly integrated on one base plate, so that TFT-LED array display can be realized. A buffering layer and an n-type GaN layer with complete structures are deposited on a large-area monocrystal liner, and on the n-type GaN layer, through an MOVCD (Metal Organic Chemical Vapor Deposition) process and other film processing processes,and with the combination with a photoetching and etching process, red, green and blue LED light-emitting layers, a p-type GaN layer and a transparent electrode layer are respectively prepared on different light-emitting areas correspondingly, and the light-emitting layers with different colors, the p-type GaN layer and the transparent electrode layer are separated into display array units. On each separated light-emitting array unit, the two TFTs and one capacitor are integrated to be taken as a control circuit of the light-emitting unit. In the invention, the shortcomings of LED and LCD (liquid crystal display) display can be overcome to a certain degree, the display quality and display effect can be greatly improved, and the manufacturing method is compatible with the existing semiconductor process, so that the industrialization is easy to realize.

Description

technical field [0001] The invention relates to an LED array display substrate and a manufacturing method thereof, in particular to a TFT-LED color array display substrate and a manufacturing method thereof. Background technique [0002] With the continuous improvement of people's material and cultural living standards, people's requirements for display technology are also getting higher and higher. Display technology is gradually developing in the direction of flat panel, small size, light weight, and low power consumption. Due to the advantages of small size, low radiation and low power consumption, liquid crystal display has been developed rapidly and has become the mainstream of current display technology, gradually replacing traditional CRT display technology in many application fields. However, liquid crystal displays also have disadvantages such as relatively slow response speed and poor color reproduction performance. Since the 1990s, the successful development of ...

AI Technical Summary

Problems solved by technology

However, the currently used splicing form of the LED display has the disadvantages of low resolution, poor color uniformity, and large volume. The coordination and consistency of different splicing parts of the LED display are difficult to guarantee, the production cost is relatively high, and the heat dissipation of high-power devices is difficult. And it is only applicable to problems such as large-screen display, which limits the further development of splicing LED color display devices

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