Supply/carry-out system

A technology for items and processing devices, applied to lighting and heating equipment, furnace components, instruments, etc., can solve problems such as not being able to follow, slowing down of supply and unloading speed, etc.

Active Publication Date: 2015-06-03
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with the increase in the size of the substrate, the supply and unloading speed decreases, and it may not be able to follow the processing on the processing equipment side.

Method used

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  • Supply/carry-out system

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Embodiment Construction

[0023] Hereinafter, the best embodiment for carrying out the present invention will be described. The scope of the present invention should be determined based on the description of the patent claims, with reference to the description in the specification and known technologies in the field, and based on the understanding of those skilled in the art. Various changes can be made within the scope not departing from the spirit of the invention. In particular, a plurality of embodiments and modifications described in this specification can be combined arbitrarily as necessary.

[0024] (Example)

[0025] Figure 1 to Figure 7 Examples and modifications thereof are shown. In the figure, 2 is a supply and unloading system, between the station 5 of the processing apparatus 4 and the cassette station 20, supplies and unloads articles such as liquid crystal display substrates one article at a time. Furthermore, in addition to this, supply and discharge are also performed between the...

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PUM

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Abstract

PROBLEM TO BE SOLVED: To increase the number of supplying / carrying-out times of articles by shortening the moving time of a traverser trolley. SOLUTION: Multiple articles contained in a cassette are supplied / carried out, one by one, to / from a processing unit. The cassettes are mounted on a plurality of cassette mounting tables arranged in one row, and a traverser trolley is moved on a straight line route between the cassette mounting tables and the station of the processing unit. Furthermore, a slide conveyor movable freely on the traverser trolley is provided, and the traverser trolley and the slide conveyor are moved simultaneously by means of a controller. COPYRIGHT: (C)2012,JPO&INPIT

Description

technical field [0001] The present invention relates to a supply and carry-out system, and more particularly to an improvement in the speed of supply and carry-out of articles. Background technique [0002] A system is known that supplies and unloads articles such as liquid crystal display substrates, plasma panel display substrates, and solar cell substrates one at a time to a processing device (Patent Document 1: JP2004-168483A). In Patent Document 1, a trolley equipped with a transfer device such as an articulated arm (SCARA arm) is disposed between the cassette and the station of the processing device, and the trolley is driven between the cassette and the station to pass through the transfer device. Move items. However, as the size of the substrate increases, the supply and unloading speed decreases, and it may not be possible to follow the processing on the processing apparatus side. Therefore, the inventors of the present invention conducted research on a technology...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G49/06
CPCB65G49/061B65G49/063G02F1/1303H01L21/67706H01L21/67769
Inventor 分部健二
Owner MURATA MASCH LTD
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