Two-stage beam shrinkage system based on photonic crystal resonant cavity and manufacturing method for two-stage beam shrinkage system
A photonic crystal and beam-shrinking system technology, applied in the optical field, can solve the problems of reducing device integration, restricting applications, complicating the structure of graded waveguides, etc., and achieving the effects of improving integration, small output spot, and low loss
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[0057] Such as figure 1 , 2 As shown, the two-stage beam shrinkage system based on the photonic crystal resonator of the present invention is composed of W7 type photonic crystal waveguide 4, photonic crystal resonator 5, W1 type photonic crystal waveguide 6 and nanowire waveguide 7, which are arranged in close order; the photonic crystal resonator The cavity 5 is formed by adding point defects 14 into the photonic crystal, and a row of dielectric pillars 13 is distributed at the connection between the photonic crystal resonator 5 and the W7-type photonic crystal waveguide 4, and the row of dielectric pillars constitutes a coupling area; the photonic crystal resonator 5 and the W1-type One or more coupling medium pillars 15 are distributed at the junction of the photonic crystal waveguide and corresponding to the point defect 14; the whole system is integrated on one substrate.
[0058] The electromagnetic wave (1550nm) of the characteristic frequency is incident from the W7 ...
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