Reaction gas transmission system

Abstract

The invention relates to a reaction gas transmission system and particularly relates to a reaction gas transmission system of a low-pressure metallorganic chemical vapor deposition process reaction chamber. The system comprises a gas pipeline arranged on the upper part of the cavity cover of the reaction chamber, wherein the gas transmission end of the gas pipeline is communicated with a spraying device in the reaction chamber through the cavity cover. The system also comprises a gas lead-in module arranged on the side wall of the interior of the reaction chamber and a gas lead-out module arranged on the lower part of the cavity cover, wherein the side wall of the reaction chamber is provided with a through hole for introducing the gas, and the through hole is hermetically communicated with the gas lead-in module; the cavity cover is provided with a through hole for leading out the gas, and the gas lead-out module and the gas leading end of the gas pipeline are communicated through the through hole; and when the cavity cover is closed, the gas lead-in module is hermetically communicated with the gas lead-out module. The system is simple in structure, low in cost and easy to maintain; and by the system, the possibility of leakage of a special gas in the transmission process is greatly reduced.

Description

technical field [0001] The invention relates to a reaction gas delivery system, in particular to a reaction gas delivery system in a reaction chamber of a low-pressure metal organic compound chemical vapor deposition process. Background technique [0002] The future market development of photovoltaic applications, especially for use in grid-connected photovoltaic power plants, depends critically on the potential to reduce the cost of solar cell production. The production process of thin-film solar cells consumes less energy, which has the potential to greatly reduce raw material and manufacturing costs; at the same time, thin-film solar cells can still generate electricity under low light conditions. Therefore, the current market demand for thin-film solar cells is gradually increasing, and the technology of manufacturing thin-film solar cells has become a research hotspot in recent years. [0003] ZnO is an N-type direct bandgap semiconductor material with a bandgap Eg of ...

AI Technical Summary

Problems solved by technology

But the crux of the problem is that the chamber needs to be opened and closed, and the opening angle is generally 110 degrees. Such an opening action is a very large angle for the flexible gas pipeline 2, and there is a high degree of bending angle. Require

At the same time, after the number of bending increases, metal fatigue will inevitably occur, and accidents are also prone to occur during exercise.

As we all know, the special gases used in the ZnO process are toxic or flammable, which will bring great safety hazards to operators and maintenance personnel

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