Improved stator structure of turbo molecular pump and manufacture method thereof

Abstract

The invention relates to an improved stator structure of a turbo molecular pump and a manufacture method thereof. The stator comprises a plurality of stages of stator blade groups, wherein each stage of stator blade group comprises an inner covering ring, an outer covering ring and a plurality of stator blades, the inner covering ring, the outer covering ring and the stator blades are integrally formed, the integral rigidity is enhanced, and the deformation is not easy to occur. The manufacture method comprises the following steps that: an original material is placed onto a computer numerical control lathe; a turning mode is used for carrying out outline side processing on the appearance of each stage of stator blade group; and a plurality of stator blades of each stage of stator blade group are processed and formed through a five-axis processing machine.

Description

technical field [0001] The invention relates to an improved stator structure of a turbomolecular pump and a manufacturing method thereof, in particular to a stator structure and a manufacturing method thereof in which stator vanes and shrouds are integrally formed. Background technique [0002] In recent years, due to the vigorous development of the semiconductor industry, the demand for related equipment in the semiconductor front-end manufacturing process has increased significantly. Among them, the heart component of the high vacuum system - the turbomolecular pump has become a high vacuum system component with great demand. [0003] The Turbo Molecular Pump originated in 1912 and was improved from the Molecular Drag Pump invented by the German Gaede. See first figure 1 As shown, a cross-sectional diagram of a known turbomolecular pump A, the turbomolecular pump A includes a rotor A1 and a stator A2, the rotor A1 is composed of a rotor shaft A10 and a plurality of rotor ...

AI Technical Summary

Problems solved by technology

[0009] Another object of the present invention is to overcome the defects of the existing turbomolecular pump stator structure and its manufacturing method, and provide a new and improved manufacturing method of the turbomolecular pump stator structure. The technical problem to be solved is To make it, by means of a milling process of a computer numerical control lathe and a five-axis processing machine, an integrally formed stator vane group is manufactured to increase the overall rigidity, make the stator vanes not easy to deform, and reduce the complexity of assembly , thereby reducing assembly man-hours, making it more suitable for practical use

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