Cleaning device and cleaning method of glass substrate

A technology for glass substrates and cleaning devices, applied in liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems of poor cleaning effect and high cost, and achieve good cleaning effect, low cost, and low cost higher effect
CN102489470AInactive Publication Date: 2012-06-13TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
Publication Date
2012-06-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a cleaning device and a cleaning method of a glass substrate. The cleaning device of the glass substrate, provided by the invention, comprises a cleaning groove, a first frequency generator used for sending ultrasonic wave with a first frequency and a second frequency generator used for sending ultrasonic wave with a second frequency, wherein the first frequency generator and the second frequency generator are arranged on the both sides of the cleaning groove. In the invention, the glass substrate is cleaned by utilizing the ultrasonic waves with different frequencies, so that the cost is reduced and the good cleaning effect is realized.
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Description

technical field

[0001] The invention relates to the field of substrate cleaning, in particular to an efficient and low-cost glass substrate cleaning device and cleaning method. Background technique

[0002] In the current liquid crystal display field, in terms of cleaning the glass substrate used to make the liquid crystal display panel, different cleaning techniques are used for particles of different particle sizes. Generally, plasma cleaning (Plasma) is used to remove organic residues on the glass substrate. Use brush spray (brush+shower) to remove particles with a particle size of 10 microns or more on the glass substrate, use pressure jetting to remove particles with a particle size of 1-10 microns on the glass substrate, and use dual-fluid spray to remove glass substrates Particles with an upper particle size of 1-5 microns.

[0003] However, with the development requirements of large size, high aperture ratio and low line width of liquid crystal display panels, in or...

Claims

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