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Electrical fuse structure

A technology of electric fuse and electric connection, which is applied in the direction of circuits, electric components, electric solid devices, etc., can solve the problems of low reliability and low yield rate, and achieve the effect of strengthening electromigration phenomenon, improving yield rate and reliability

Inactive Publication Date: 2012-07-04
MEDIATEK INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the programmable fuse arrays that have gone through the fuse blowing process in the past have low yield and low reliability

Method used

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Embodiment Construction

[0016] In the description and claims, certain words are used to refer to specific elements. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. This specification and claims do not use differences in names as a way to distinguish elements, but use differences in functions of elements as a criterion for distinguishing. The "including" mentioned in the entire specification and claims is an open term, so it should be interpreted as "including but not limited to". In addition, the term "coupled" herein includes any direct and indirect electrical connection means. Therefore, if the text describes that the first device is coupled to the second device, it means that the first device can be directly electrically connected to the second device, or indirectly electrically connected to the second device through other devices or connection means.

[0017] According to the present invention, the terms "wafer" and "su...

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Abstract

An electrical fuse structure includes a first metal strip having a first width W1 and a first length L1; a second metal strip having a second width W2 and a second length L2; and at least one via element having a via width W0, the via element being electrically connecting one end of the first metal strip to one end of the second metal strip, wherein W1<5W0. The improved electrical fuse structure can reinforce the electric transfer phenomenon during the fuse burning process and greatly improves the yield of the fuse burning process and the reliability.

Description

Technical field [0001] The invention belongs to the field of electric fuses. In particular, it refers to a via-type electric fuse structure, which has better yield and reliability during the fuse blowing process. Background technique [0002] Electrical fuses (e-fuses) are usually used in redundant circuits of memories or programmable fuse arrays to provide programmability. At present, there are many types of electric fuses, which usually include a sinterable connection part and two terminal parts connected. One type of electric fuse may include a via plug, which is connected to the metal layer cathode and the metal layer anode. With the flow of current, the electric fuse can be blown. [0003] The programmable fuse array can be connected to an electronic circuit, which may need to be adjusted to provide proper operation. According to whether each electric fuse located in the array is blown, a logic signal of 1 or 0 can be provided correspondingly. The electric fuses existing ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/525
CPCH01L23/5256H01L2924/0002H01L2924/00
Inventor 陈晞白
Owner MEDIATEK INC
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