Flexible intracranial cortex microelectrode chip, and preparation method and packaging method and packaging structure thereof
A technology of micro-electrode and endothelial layer, applied in the direction of circuits, electrical components, electrical solid devices, etc., can solve problems such as nerve tissue damage, device performance loss, and inflammatory reactions, and achieve reduced attenuation, good flexible matching, and flexibility Good results
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[0036] In order to make the objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0037] figure 1It is a schematic diagram of a flexible intracranial cortical microelectrode chip in an embodiment. The flexible intracranial cortical microelectrode chip 13 includes a flexible substrate 1, an insulating layer 2, a microelectrode unit 3, an electrode lead 4 electrically connected to the microelectrode unit 3, and The lead welding spot 5 electrically connected with the electrode lead 4. The micro-electrode unit 3 , the electrode leads 4 and the lead welding spots 5 are all arranged on the flexible substrate 1 , and the insulating layer 2 is arranged on the flexible substrate 1 and covers the electrode leads 4 . A plurality of micro-electrode units 3 are arranged in a matrix to form a micro-electrode array. The microelectrode...
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