Method and device for collecting ash from vacuum pipeline of single-crystal furnace
A dust collection and vacuum pipeline technology, applied in the direction of single crystal growth, chemical instruments and methods, crystal growth, etc., can solve problems such as poor atmosphere, affecting crystallization, vacuum pump oil failure, etc., to reduce factors and effects affecting the environment. Obvious, prolonging the service life of the effect
Active Publication Date: 2015-06-24
GRINM SEMICONDUCTOR MATERIALS CO LTD
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Problems solved by technology
The sticky matter combined with volatile matter and vacuum pump oil will quickly make the vacuum pump oil invalid, resulting in frequent replacement of vacuum pump oil. Even if the vacuum pump oil can be replaced in time, the life of the vacuum pump will be greatly reduced!
[0013] 2. Volatile matter will adhere to the vacuum pipeline, and after a long time, it will partially block the pipeline, affecting the normal operation of the vacuum system, making the atmosphere poor and affecting crystal formation.
Method used
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[0030] Such as Figure 1a , Figure 1b , Figure 2a , Figure 2b , image 3 , Figure 4a , Figure 4b , Figure 5 As shown,
[0031] 1 is the nozzle, 2 is the vacuum pipeline, and 1-1 is the sealing ring bracket groove on the nozzle. 3 is the dust collection tank, 3-1 is the mouth of the tank, and 3-2 is the sealing ring bracket groove. 4 is a bracket with a sealing ring, 4-1 is a bracket, and 4-2 is a sealing ring. 5 is the clamp.
[0032] A nozzle 1 is provided in the vertical downward direction at the rising corner of the horizontal pipe 2 through which the gas and volatile dust between the furnace body and the vacuum pump pass. There are sealing ring bracket grooves 1-1 and 3 on the nozzle to collect the dust. The dust collection tank can be made into a cylindrical shape. 3-1 is the mouth of the collecting tank, and the mouth of the tank is provided with a sealing ring bracket groove 3-1, 4 is a bracket with a sealing ring, of which 4-1 is a bracket and 4- 2 is a sealing rin...
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The invention relates to a method and device for collecting ash from a vacuum pipeline of a single-crystal furnace. The method is characterized by arranging a nozzle in the vertical downward direction at the rising corner of a horizontal pipeline through which gas and volatile ash pass between a furnace body and a vacuum pump, wherein the nozzle is provided with an ash collecting device. The collecting device comprises a nozzle having a bracket trough, an ash collecting tank having a bracket trough at the tank opening, a bracket having a seal ring for connecting the nozzle and the ash collecting tank, and a clamp for fastening. Through the invention, these deposited volatiles can be fixedly collected into the tank, the gas passes through above the tank, and the volatiles in the tank can not be carried away any more, so that most of volatile ash generated in the crystal pulling process can be separated out and used up, thereby greatly prolonging the service life of the vacuum pump and ensuring the high durability, simple assembling, low cost and obvious effect of the device.
Description
Technical field [0001] The invention relates to a method and a device for collecting dust from a vacuum pipe of a single crystal furnace. Background technique [0002] In the process of global informatization, information technology represented by the communications industry, computer industry, network industry, and home appliance industry has achieved rapid development, and the information industry has become the largest industry in every developed country. The development of my country's information industry has surpassed traditional industries and has become the largest industry in the national economy and a pillar industry for foreign exchange earning through exports. The semiconductor industry, especially the integrated circuit industry, is the foundation and core of the information industry, the leading and pillar industry for the modernization and information construction of the national economy, and the core technology for transforming and upgrading traditional industries...
Claims
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IPC IPC(8): C30B15/00
Inventor 邓德辉侯艳柱方峰李海洋郑沉王学锋叶松芳刘红艳
Owner GRINM SEMICONDUCTOR MATERIALS CO LTD