Laser force-measuring system used in scanning electron microscope

Abstract

The invention discloses a laser force-measuring system used in a scanning electron microscope, which comprises the base of the scanning electron microscope and a manipulater, wherein a laser force-measuring device is fixed on the manipulater and connected with a laser controller outside the scanning electron microscope through an optical fiber, and comprises a laser head, a cantilever beam, a slide block and a fixed block; the cantilever beam is connected with the fixed block; the slide block is connected with the fixed block through a bolt; and the laser head penetrates the slide block and is aligned with the cantilever beam. During operation, a counter force exerted on one end part of the cantilever beam by a sample can lead to deformation of the cantilever beam, the deformation can be measured by a laser in a real-time way, and the magnitude of the force can be obtained through real-time computation of the change of a laser distance. The laser force-measuring system has the advantages of small size, simple structure, high stability and strong real-time performance, can works in vacuum, and is particularly suitable to realize the operation and the measurement of a microscopic sample in the electron microscope.

Description

technical field [0001] The invention belongs to the technical field of micro-nano equipment and measurement, and in particular relates to a laser force measuring system used in a scanning electron microscope. Background technique [0002] Scanning Electron Microscope (FESEM) scans the surface of the sample with a very thin electron beam, collects the generated secondary electrons with a special detector, forms an electrical signal and sends it to the picture tube, and displays the object on the fluorescent screen. Its resolution can reach 0.2 nanometers, much higher than that of optical microscopes. [0003] With the development of nanotechnology, nanoscale measurement is becoming more and more important. Among them, the measurement of force is of great significance for studying the physical properties of materials. However, the force measurement technology currently applied under the electron microscope is mainly calculated by observing and measuring the deformation of th...

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Problems solved by technology

Moreover, the calculation accuracy depends on the accuracy of the image. When the image magnification is low, the accuracy of the measurement results will also be lower.

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