One-drive-two switch changeover-type adapter cable
A switch switching and cable technology, applied in the direction of measurement leads/probes, etc., can solve the problems of port limitation, impact on test accuracy, wear and other problems, reduce plugging and unplugging actions, avoid joint wear and leakage, and ensure high The effect of precision
Inactive Publication Date: 2012-08-01
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology
However, currently Agilent B1500A can only connect to one device at a time due to the limited port, so it is necessary to repeatedly plug and unplug the SMU (Source Measurement Unit) cable to switch between Cascade Elite 300 and Agilent 16442Btest fixture
The disadvantage of this is that it will cause wear on the connector of the SMU cable and the SMU port on the device, which will increase the leakage current and affect the accuracy of the test.
In the field of semiconductor technology, the test accuracy is very high. For example, the test accuracy required by many low-leakage projects is about 1E-13 amperes, which is easily affected by the above-mentioned wear and tear.
Method used
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[0009] see figure 1 The shown one-to-two switch switching adapter cable 4 is used to connect a semiconductor test analyzer 1 (such as Agilent B1500A), a probe station 2 (such as Cascade Elite 300) and a test fixture 3 (such as Agilent 16442B test fixture ) for a reliability test. The cable 4 firstly includes a main control connector 41 , a first tap 42 and a second tap 43 respectively connected to the above three devices, respectively corresponding to the SMU ports on the three devices. The cable 4 also includes a dual-control switch 40, which is used to switch connection ports. The dual-control switch 40 includes a master control terminal, a first connection terminal and a second connection terminal. The main control end is connected to the main control joint 41 through the main control cable 44; the first connection end is connected to the first tap 42 through the first sub-cable 45; the second connection end is connected through the second sub-line The cable 46 is connect...
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The invention relates to a connecting device of a semiconductor device, in particular to a one-drive-two switch changeover-type adapter cable, which comprises a main control connector, a first tap and a second tap as well as a dual-control switch, wherein the dual-control switch comprises a main control end, a first connecting end and a second connecting end, the main control end is connected with the main control connector through a main control cable, the first connecting end is connected with the first tap through a first branch cable, and the second connecting end is connected with the second tap through a second branch cable; and by operating the dual-control switch, a working state that the cable is respectively communicated with the first tap or the second tap is realized. Through the changer-over switch, two circuits of the branches can be switched at any time, so that abrasion and leakage of the connector caused by frequent plugging and unplugging of a spectrum monitoring unit (SMU) connecting wire can be avoided, and the high precision of the test device can be guaranteed. Moreover, the dual-control switch is adopted, so that noise caused by one branch when the other branch is used can be shielded.
Description
technical field [0001] The invention belongs to the technical field of semiconductors, in particular to a semiconductor device connection device. Background technique [0002] In the current semiconductor reliability experiment, a semiconductor test analyzer (such as AgilentB1500A) is used, and two devices need to be connected to it for testing, one is a probe station (such as Cascade Elite 300), and the other The bench is a test fixture (eg Agilent 16442B test fixture). However, currently Agilent B1500A can only connect to one device at a time due to limited ports, so it is necessary to repeatedly plug and unplug the SMU (Source Measurement Unit) cable to switch between Cascade Elite 300 and Agilent 16442Btest fixture. The disadvantage of this is that it will cause wear on the connector of the SMU cable and the SMU port on the device, and the wear will increase the leakage current, which will affect the accuracy of the test. In the field of semiconductor technology, the t...
Claims
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Inventor 王炯尹彬锋周柯
Owner SHANGHAI HUALI MICROELECTRONICS CORP