The invention relates to the technical field of semiconductors, and discloses a
semiconductor material testing device and method, and the device comprises a parameter analyzer, the lower part of the parameter analyzer is provided with a connection
assembly, and the right side of the parameter analyzer is provided with a protection storage
assembly. The handles at the two ends of the integrated socket in the connecting
assembly are pushed into the positioning grooves, so that the integrated socket forms a stable locking state. The test method comprises the following steps: controlling a
source measurement unit to inject calibration current into a test loop by using a physical boundary condition with a stable locking state solidified; the static characteristic de-embedding
processing module is used for establishing a static linear impedance
mathematical model and extracting a static
contact impedance constant and a static bias
voltage, and in a formal test, the
system performs de-embedding compensation calculation on an original response
voltage by using the static
contact impedance constant and the static bias
voltage. The real electrical response voltage of the
semiconductor material is restored, and the comprehensive protection performance of the testing device is improved.