The utility model relates to a positioning device used for a
wafer measurement driving mechanism, the positioning device is installed at a positioning
station of the
wafer measurement driving mechanism, the positioning device comprises a center positioning module, a rotation phase positioning module and a code identification module, the center positioning module comprises two clamping arms and a clamping arm driving
assembly, the clamping claws located on the two clamping arms abut against the edge of the
wafer respectively, the wafer abutting portions, abutting against the edge of the wafer, of the clamping claws are always located on the circumference with the fixed circle center position and the same
radius, the circle center position is located on a rotating shaft of a rotary table module of the wafer measurement driving mechanism in the positioning
station state, and the wafer center positioning precision is improved. Meanwhile, the rotating phase positioning module and the code identification module which are arranged above the central positioning module are driven by the same radial driving equipment to move to proper
radius positions, and are used for detecting and identifying directional nicks and codes at the edge of the wafer respectively, so that the number of times that the wafer needs to be transferred between different stations is reduced, and the working efficiency is improved. The measurement process is simplified, and the measurement time is saved.