Probe-type film thickness measuring machine automatic wiped film measuring device and using method thereof

A measuring machine and probe-type technology, which is applied in the direction of electromagnetic measuring devices, electric/magnetic thickness measurement, etc., can solve the problems of manual scraping film accuracy cannot be guaranteed, the risk of fragmentation, and the time to increase the measuring range of the machine, so as to avoid damage Measured objects, improved accuracy and operability, and reduced measurement time

Active Publication Date: 2016-12-21
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing probe-type film thickness measuring machine includes a measuring machine case 6, a measuring head shaft 2, a measuring disk 1, a search CCD3, a measuring CCD4 and a measuring needle 5; one end of the measuring head shaft 2 is arranged on the measuring head At the bottom of the cabinet 6, the other end of the measuring head shaft 2 is fixed on the upper surface of the measurin

Method used

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  • Probe-type film thickness measuring machine automatic wiped film measuring device and using method thereof
  • Probe-type film thickness measuring machine automatic wiped film measuring device and using method thereof
  • Probe-type film thickness measuring machine automatic wiped film measuring device and using method thereof

Examples

Experimental program
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Example Embodiment

[0032] Specific implementation mode one: combine figure 2 and image 3 Describe this embodiment, a probe-type film thickness measuring machine automatic scraping film measuring device described in this embodiment, including a measuring chassis 6, a measuring head shaft 2, a measuring disc 1, a search CCD 3, a measuring CCD4 and measuring needle 5;

[0033] One end of the measuring head shaft 2 is arranged at the bottom of the measuring machine case 6, and the other end of the measuring head shaft 2 is fixed on the upper surface of the measuring disc 1; the measuring head shaft 2 is used to drive the measuring disc 1 to rotate;

[0034] The search CCD3, the measurement CCD4 and the measurement needle 5 are all arranged on the lower surface of the measurement disk 1; the search CCD3 is used to determine the measurement point of the measurement object; the measurement CCD4 is used to provide visual field observation during measurement, so that Draw the height change curve of t...

Example Embodiment

[0041] Specific embodiment 2: A probe-type film thickness measuring machine automatic scraping film measuring device described in this embodiment includes a measuring chassis 6, a measuring head shaft 2, a measuring disc 1, a search CCD 3, a measuring CCD4 and measuring needle 5;

[0042] One end of the measuring head shaft 2 is arranged at the bottom of the measuring machine case 6, and the other end of the measuring head shaft 2 is fixed on the upper surface of the measuring disc 1; the measuring head shaft 2 is used to drive the measuring disc 1 to rotate;

[0043] The search CCD3, the measurement CCD4 and the measurement needle 5 are all arranged on the lower surface of the measurement disk 1; the search CCD3 is used to determine the measurement point of the measurement object; the measurement CCD4 is used to provide visual field observation during measurement, so that Draw the height change curve of the measurement area;

[0044] It also includes a scraper blade 7, a scr...

Example Embodiment

[0051] Specific implementation mode three: combination Figure 4 Describe this embodiment, this specific implementation is based on the method of using the automatic scraping film measurement device of a probe-type film thickness measuring machine described in the first embodiment,

[0052] Include the following specific steps:

[0053] Step 1. Determine the measurement point of the measuring object by searching the CCD3, and perform step 2;

[0054] Step 2. After determining the measuring point, move the measuring needle 5 to the measuring point, draw the height change curve of the measuring area through the pressure sensor above the measuring needle 5 through software processing, and measure the CCD4 for real-time monitoring of the needle volume The measurement process and the measurement position accuracy, perform step three; in step two, according to the height change curve of the measurement area drawn, the film thickness of the measurement object is obtained through sof...

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Abstract

The invention provides a probe-type film thickness measuring machine automatic wiped film measuring device and a using method thereof. A wiped film blade, a wiped film debris processing mechanism and a visual field CCD are added to the existing probe-type film thickness measuring machine. The wiped film blade, the wiped film debris processing mechanism and the visual field CCD are all arranged on a measuring disc. Through searching the CCD, a measuring point position of a measuring object is determined. A measuring probe head moves to the measuring point position, a height change curve in a measuring area is drawn, whether the measuring object needs wiped film processing is judged, wiped film coordinates are determined through the relative distance between the wiped film blade and the measuring probe, the point position, the wiped film direction and the wiped film length are selected, the wiped film blade drops, automatic film wiping replaces manual film wiping, the measuring time is greatly reduced, the wiped film measuring precision and the operability are greatly enhanced, and the danger of damaging the measuring object by the wiped film blade can be avoided. The device and the method of the invention are applicable to each channel process for a color substrate.

Description

technical field [0001] The invention relates to a probe-type film thickness measuring machine, in particular to an automatic scraping film measuring device for the probe-type film thickness measuring machine used in the color substrate manufacturing process. Background technique [0002] The current LCD panel industry has ushered in an unprecedented stage of overall development and growth, and market demand is developing towards diversification, which requires improvements in the production of the LCD panel industry. The main process flow of the existing color substrates in the LCD panel industry is coating Cloth→exposure→development, the probe-type film thickness measuring machine is used to measure the film thickness and flatness after each process. Therefore, to reduce the film thickness of the color substrate and improve the flatness of the color substrate, the improved probe Type film thickness measuring machine is particularly important; [0003] The measurement princ...

Claims

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Application Information

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IPC IPC(8): G01B7/06
CPCG01B7/06
Inventor 蒲建宇李启明
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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