Polycrystalline silicon reduction furnace

Abstract

The invention discloses a polycrystalline silicon reduction furnace, which comprises a furnace support. A furnace body is installed on the furnace support, a base plate is installed between the furnace support and the furnace body, the furnace body is fit with the base plate to form a hollow chamber, a plurality of electrodes are installed on the base plate, graphite pieces are installed on the electrodes, and silicon mandrils are located in the chamber and connected with the graphite pieces. The polycrystalline silicon reduction furnace further comprises a heat insulation baseboard and a heat insulation cover, the heat insulation baseboard and the heat insulation cover are located in the chamber, the heat insulation baseboard is installed on the base plate, a plurality of buckle supporting plates are fixedly installed on the inner wall of the furnace body, the heat insulation cover is installed on the buckle supporting plates, a hollow reaction chamber is refined by the heat insulation cover and the buckle supporting plates, and the silicon mandrils are located in the reaction chamber. According to the polycrystalline silicon reduction furnace, heat in the reaction chamber is effectively prevented from being taken away by cooling water, so that the heat storage capacity of the reaction chamber is improved, the waste of electric energy is reduced, and the production efficiency of polycrystalline silicon is improved.

Description

technical field [0001] The invention relates to the field of polysilicon production and manufacturing, in particular to a polysilicon reduction furnace for producing and manufacturing polysilicon. Background technique [0002] Polycrystalline silicon is the raw material for preparing monocrystalline silicon and solar cells, and is the cornerstone of the global electronics industry and photovoltaic industry. At the same time, due to the energy crisis and the requirements of environmental protection, the world is actively developing renewable energy. Solar energy has attracted attention because of its cleanliness, safety, and abundant resources. With the rapid development of the solar industry at home and abroad, the demand for polysilicon is also increasing. . [0003] refer to figure 1 , the existing polysilicon reduction furnace includes a furnace frame 110, a furnace body 120 is installed on the furnace frame, a chassis 130 is installed between the furnace frame 110 and ...

AI Technical Summary

Problems solved by technology

[0005] In the production process of polysilicon by the improved Siemens method, the reduction furnace is the key equipment for polysilicon deposition. To maintain a high temperature of 1100 °C in the furnace body, it is necessary to continuously provide sufficient power supply. During the production process, the power supply in the furnace body 120 of the reduction furnace is generated The heat in the furnace body 120 wall interlayer and the chassis 130 interlayer need to be cooled, so that most of the heat in the furnace body is taken away by the cooling water of the reduction furnace, causing great waste, increasing the cost of polysilicon production and increasing the cost of electricity consumption. The cost of producing polysilicon; it also reduces the production efficiency of polysilicon; therefore, it is necessary to develop an improved polysilicon reduction furnace to make full use of the reaction heat, directly reduce the reduction power consumption, reduce production costs, and improve production efficiency

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