Cleaning component, cleaning method of coater, cleaning device and manufacture method of component for display

Abstract

The present invention relates to a cleaning component, a cleaning method of a coater, a cleaning device and a manufacture method of a component for a display. During the cleaning process, the flowing speed of a coating fluid removed from the coater along the cleaning component is improved, thus the coating fluid is not adhered on the coater and because of no residue of the coating fluid or a solvent for cleaning, abnormal thickness of a coating film or defect on the surface of the coating film is not generated. The cleaning component comprises a first surface and a second surface opposite to the first surface. The cleaning component contacts with a discharge port surface of a discharge port extending along one direction of the coater and two adjacent surfaces of the discharge port surface and simultaneously slides along the direction, thus the discharge port surface and the two adjacent surfaces are cleaned. The cleaning component comprises a cleaning portion arranged on the first surface side and simultaneously contacted with the discharge port surface and the two adjacent surfaces; a plurality of flowing path surfaces started from the cleaning portion and always extending to the second surface side, wherein a cutting groove is arranged on the second surface side on the flowing path surface.

Description

technical field [0001] The present invention relates to the parts that are used in the manufacturing field of display parts such as color filters and array substrates for color liquid crystal displays, panels for plasma displays, optical filters, etc. Discharge port of slit nozzle of slit coater for discharging coating liquid on surface of cloth member to form coating film thereon, cleaning method and cleaning device therearound, and manufacturing method of display member using these improvement of. Background technique [0002] A color liquid crystal display is composed of components such as a color filter and an array substrate for TFT, and the manufacture of both the color filter and the array substrate for TFT includes a lot of coating of a low-viscosity liquid material and drying of the coated liquid material, thereby forming a coating film manufacturing process. [0003] For example, in the manufacturing process of color filters, a coating film of black photoresist m...

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Problems solved by technology

In addition, when the next coating is performed, the adhesive residue contacts the coating liquid, thereby producing coating streaks starting from the adhesive residue, and also causing the adhesive residue to melt due to the adhesion of the adhesive residue on the discharge port surface and the inclined surface of the lip. Adhesive residues themselves detach from the discharge port face and lip bevel to mix into the coating film and become granular, thus causing further coating defects

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